scholarly journals Nonlocal Electron Kinetics in DC Discharges

1997 ◽  
Vol 07 (C4) ◽  
pp. C4-143-C4-154 ◽  
Author(s):  
L. L. Alves ◽  
G. Gousset ◽  
C. M. Ferreira
Keyword(s):  
Electron Kinetics

Experimental and Theoretical Study of the Inhomogeneous Electron Kinetics in the dc Column Plasma

1996 ◽  
Vol 36 (4) ◽  
pp. 449-469 ◽  
Author(s):  
S. Pfau ◽  
J. Rohmann ◽  
D. Uhrlandt ◽  
R. Winkler
Keyword(s):  
Theoretical Study ◽  
Electron Kinetics

Time-resolved electron kinetics in swift heavy ion irradiated solids

2015 ◽  
Vol 48 (35) ◽  
pp. 355303 ◽  
Author(s):  
N A Medvedev ◽  
R A Rymzhanov ◽  
A E Volkov
Keyword(s):  
Heavy Ion ◽  
Time Resolved ◽  
Electron Kinetics ◽  
Swift Heavy Ion

Electron Kinetics in Dye Sensitized Solar Cells Employing Anatase with (101) and (001) Facets

2015 ◽  
Vol 160 ◽  
pp. 296-305 ◽  
Author(s):  
Barbora Laskova ◽  
Thomas Moehl ◽  
Ladislav Kavan ◽  
Marketa Zukalova ◽  
Xianjie Liu ◽  
...  
Keyword(s):  
Solar Cells ◽  
Dye Sensitized Solar Cells ◽  
Electron Kinetics ◽  
Dye Sensitized ◽  
Sensitized Solar Cells

Plasma and electrical characteristics depending on an antenna position in an inductively coupled plasma with a passive resonant antenna

2021 ◽  
Author(s):  
Ju Ho Kim ◽  
Chin-Wook Chung
Keyword(s):  
Inductively Coupled Plasma ◽  
Metal Plate ◽  
Electrical Characteristics ◽  
Coupling Loss ◽  
Rf Power ◽  
Ion Density ◽  
Electron Kinetics ◽  
Inductively Coupled ◽  
Cylindrical Reactor ◽  
Antenna Position

Abstract We investigated the plasma and electrical characteristics depending on the antenna position in an inductively coupled plasma with a passive resonant antenna. When the powered antenna and passive resonant antenna are installed near the top plate and in the middle of the cylindrical reactor (Setup A), respectively, the ion density at the resonance is about 2.4 times to 9 times higher than that at non-resonance. This is explained by the reduction in power loss in the powered antenna (including the matching circuits) and the increase in power absorbed by the plasma discharge. However, when the powered antenna and passive resonant antenna are interchanged (Setup B), the ion density at the resonance is not significantly different from that at the non-resonance. When RF power is changed from 50 W to 200 W, the ion density at the resonance of Setup B is 1.6 times to 5.4 times higher than at the non-resonance of Setup A. To analyse this difference, the profile of the z-axis ion density is measured and the electric and magnetic field simulations are investigated. The results are discussed along with the electron kinetics effect and the coupling loss between the antenna and the metal plate.

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