Low temperature operation of ultra-thin gate oxide sub-0.1 μm MOSFETs

2002 ◽  
Vol 12 (3) ◽  
pp. 57-60 ◽  
Author(s):  
B. Cretu ◽  
F. Balestra ◽  
G. Ghibaudo ◽  
G. Guégan
Keyword(s):  
Low Temperature ◽  
Gate Oxide ◽  
Thin Gate Oxide

Ultra Low-Temperature Growth of High-Integrity Thin Gate Oxide Films by Low-Energy Ion-Assisted Oxidation

1995 ◽  
Vol 34 (Part 1, No. 2B) ◽  
pp. 900-902 ◽  
Author(s):  
Jinzo Watanabe ◽  
Yasuaki Kawai ◽  
Nobuhiro Konishi ◽  
Tadahiro Ohmi
Keyword(s):  
Low Temperature ◽  
Oxide Films ◽  
Gate Oxide ◽  
Low Energy ◽  
Temperature Growth ◽  
Low Temperature Growth ◽  
High Integrity ◽  
Thin Gate Oxide

Reduction in leakage current of low-temperature thin-gate oxide by repeated spike oxidation technique

2002 ◽  
Vol 23 (1) ◽  
pp. 28-30 ◽  
Author(s):  
Chao-Chi Hong ◽  
Chang-Yun Chang ◽  
Chaung-Yuan Lee ◽  
Jenn-Gwo Hwu
Keyword(s):  
Low Temperature ◽  
Leakage Current ◽  
Gate Oxide ◽  
Thin Gate Oxide

Improvement of thin-gate oxide integrity using photo-enhanced low-temperature nitridation

1990 ◽  
Vol 33 (8) ◽  
pp. 1039-1042 ◽  
Author(s):  
Y.K. Fang ◽  
K.C. Hwang ◽  
Y.W. Chen ◽  
C.P. Chiang
Keyword(s):  
Low Temperature ◽  
Gate Oxide ◽  
Thin Gate Oxide ◽  
Gate Oxide Integrity
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