Low-temperature deposition of weakly-stressed nanocrystalline silicon films by reactive magnetron sputtering

2004 ◽  
Vol 29 (1) ◽  
pp. 33-38 ◽  
Author(s):  
A. Ben Othman ◽  
Y. Leconte ◽  
P. Marie ◽  
K. Zellama ◽  
C. Goncalves ◽  
...  
Keyword(s):  
Low Temperature ◽  
Magnetron Sputtering ◽  
Nanocrystalline Silicon ◽  
Reactive Magnetron Sputtering ◽  
Silicon Films ◽  
Reactive Magnetron ◽  
Low Temperature Deposition ◽  
Temperature Deposition ◽  
Nanocrystalline Silicon Films

Room temperature deposition of crystalline HfN thin films by DC reactive magnetron sputtering

2021 ◽  
Author(s):  
Wuttichai Phae-ngam ◽  
Tossaporn Lertvanithphol ◽  
Chanunthorn Chananonnawathorn ◽  
Rattanachai Kowong ◽  
Mati Horprathum ◽  
...  
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Room Temperature ◽  
Reactive Magnetron Sputtering ◽  
Reactive Magnetron ◽  
Dc Reactive Magnetron Sputtering ◽  
Temperature Deposition
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