Testing and verification of MEMS resonator filters

2020 ◽  
pp. 287-322
Author(s):  
Vasu Pulijala
Keyword(s):  
Mems Resonator ◽  
Resonator Filters

Read and Write Operations of Memory Device Consisting of Nonlinear MEMS Resonator

2014 ◽  
Vol 1 ◽  
pp. 352-355 ◽  
Author(s):  
Atsushi YAO ◽  
Takashi HIKIHARA
Keyword(s):  
Memory Device ◽  
Mems Resonator

A zinc dioxide-on-silicon MEMS resonator for narrowband filtering

2014 ◽  
Author(s):  
Mortada Ossama ◽  
Blondy Pierre ◽  
Crunteanu Aurelian ◽  
Chatras Matthieu ◽  
Jean-Christophe Orlianges
Keyword(s):  
Mems Resonator

Design of a MEMS Resonant Wind Sensor on Airplane Wing

2013 ◽  
Vol 562-565 ◽  
pp. 436-440
Author(s):  
Chao Wei Si ◽  
Guo Wei Han ◽  
Jin Ning ◽  
Wei Wei Zhong ◽  
Fu Hua Yang
Keyword(s):  
High Vacuum ◽  
Pressure Change ◽  
Wind Pressure ◽  
Damping Factor ◽  
Deep Reactive Ion Etching ◽  
Mems Resonator ◽  
Mems Resonators ◽  
Element Simulation ◽  
Airplane Wing ◽  
Soi Substrates

A new kind of wind sensor made up of MEMS resonators is designed in the paper capable of sensing the lift, the resistance and the turbulence of airplane wings by mounting on the surface. The designed wind sensor is made up of four MEMS wind pressure gauges fixed around a square wind resistance block which used to block the wind to change the wind pressure on the surface, and the change of wind pressure is detected by MEMS wind pressure gauges to reveal the air condition on the surface of the airplane wings. As known, a MEMS resonator is a second-order resonant system whose damping factor is mainly dependent on the air pressure, and the characteristic is often used to detecting the airtightness of a sealed chamber for the damping factor is sensitive under high vacuum, while a MEMS resonator with the damping factor sensitive at atmospheric pressure is designed in this paper for sensing wind pressure change, and the MEMS resonator is manufactured on SOI substrates with deep reactive ion etching technology. Also relations between the wind pressure change and the wind speed around a block at atmosphere is revealed by finite element simulation. Compared to traditional wind sensors such as anemometers and Venturi tubes, the designed MEMS wind sensor with a very small size is suitable to mount on different zones of a wing with a large amount to monitor the air condition and have less influence on air flow.

The Role of Constraints and Human Interaction in Evolving MEMS Designs: Microresonator Case Study

2004 ◽  
Author(s):  
Raffi Kamalian ◽  
Alice M. Agogino ◽  
Hideyuki Takagi
Keyword(s):  
Genetic Algorithms ◽  
Geometric Constraints ◽  
Human Interaction ◽  
Design System ◽  
Current State ◽  
Mems Resonator ◽  
Computer Aided ◽  
Generative Methods

In this paper we review the current state of automated MEMS synthesis with a focus on generative methods. We use the design of a MEMS resonator as a case study and explore the role that geometric constraints and human interaction play in a computer-aided MEMS design system based on genetic algorithms.

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