Large‐scale data principal component analysis of phase transition from a‐Si:H to nc‐Si:H using PECVD optical emission spectra
1997 ◽
Vol 10
(1)
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pp. 52-61
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2006 ◽
pp. 745-756
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2008 ◽
Vol 25
(1)
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pp. 13-18
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2009 ◽
Vol 20
(8)
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pp. 2153-2159
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2018 ◽
Vol 101
(1-4)
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pp. 329-337
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