Capacitive humidity sensor with a coplanar electrode structure based on anodised porous alumina film

Jiawei Li; Xinhua Lin; Jie Li; Ying Liu; Min Tang

doi:10.1049/mnl.2012.0666

Capacitive humidity sensor with a coplanar electrode structure based on anodised porous alumina film

Micro & Nano Letters ◽

10.1049/mnl.2012.0666 ◽

2012 ◽

Vol 7 (11) ◽

pp. 1097-1100 ◽

Cited By ~ 13

Author(s):

Jiawei Li ◽

Xinhua Lin ◽

Jie Li ◽

Ying Liu ◽

Min Tang

Keyword(s):

Humidity Sensor ◽

Porous Alumina ◽

Alumina Film ◽

Electrode Structure ◽

Capacitive Humidity Sensor

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Nano particle porous alumina based thin film parallel plate capacitive humidity sensor

10.1063/1.4872672 ◽

2014 ◽

Cited By ~ 1

Author(s):

Shailesh Kumar

Keyword(s):

Thin Film ◽

Parallel Plate ◽

Humidity Sensor ◽

Porous Alumina ◽

Nano Particle ◽

Capacitive Humidity Sensor

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Electrode Structure and Heat Treatment Effects on Stabilization of Capacitive Humidity Sensor with Plasma-Polymerized Thin Film

Japanese Journal of Applied Physics ◽

10.1143/jjap.38.909 ◽

1999 ◽

Vol 38 (Part 1, No. 2A) ◽

pp. 909-912 ◽

Cited By ~ 2

Author(s):

Shin-ichi Takeda

Keyword(s):

Thin Film ◽

Heat Treatment ◽

Humidity Sensor ◽

Treatment Effects ◽

Electrode Structure ◽

Capacitive Humidity Sensor

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A Thin Film Porous Alumina-Based Cross-Capacitive Humidity Sensor

IEEE Transactions on Instrumentation and Measurement ◽

10.1109/tim.2019.2921438 ◽

2020 ◽

Vol 69 (5) ◽

pp. 2269-2276 ◽

Cited By ~ 7

Author(s):

Zubair Hassan Zargar ◽

Tarikul Islam

Keyword(s):

Thin Film ◽

Humidity Sensor ◽

Porous Alumina ◽

Capacitive Humidity Sensor

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Effect of Polyethylene Glycol in Porous Alumina Based Thin Film Capacitive Humidity Sensor and Its Modelling

Transactions of the Indian Ceramic Society ◽

10.1080/0371750x.2013.793995 ◽

2013 ◽

Vol 72 (1) ◽

pp. 47-51 ◽

Cited By ~ 3

Author(s):

Tarikul Islam ◽

Lokesh Kumar ◽

Geetika Aswani

Keyword(s):

Thin Film ◽

Polyethylene Glycol ◽

Humidity Sensor ◽

Porous Alumina ◽

Capacitive Humidity Sensor

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A high-and-rapid-response capacitive humidity sensor of nanoporous anodic alumina by one-step anodizing commercial 1050 aluminum alloy and its enhancement mechanism

Sensors and Actuators B Chemical ◽

10.1016/j.snb.2021.130156 ◽

2021 ◽

pp. 130156

Author(s):

C.K. Chung ◽

C.A. Ku ◽

Z.E. Wu

Keyword(s):

Aluminum Alloy ◽

Humidity Sensor ◽

Anodic Alumina ◽

Rapid Response ◽

Enhancement Mechanism ◽

Nanoporous Anodic Alumina ◽

One Step ◽

1050 Aluminum Alloy ◽

Capacitive Humidity Sensor

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Fully inkjet-printed BaTiO3 capacitive humidity sensor: microstructural engineering of the humidity sensing layer using bimodal ink

Ceramics International ◽

10.1016/j.ceramint.2021.05.191 ◽

2021 ◽

Author(s):

Frances Danielle M. Fernandez ◽

Murali Bissannagari ◽

Jihoon Kim

Keyword(s):

Humidity Sensor ◽

Humidity Sensing ◽

Capacitive Humidity Sensor

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In-Situ Thickness Measurement System for Porous Alumina Film Based on AFM and Spectrometer

Journal of Physics Conference Series ◽

10.1088/1742-6596/48/1/200 ◽

2006 ◽

Vol 48 ◽

pp. 1073-1077 ◽

Cited By ~ 4

Author(s):

D Xiong ◽

H J Zhang ◽

D X Zhang

Keyword(s):

Measurement System ◽

Porous Alumina ◽

Thickness Measurement ◽

Alumina Film ◽

Thickness Measurement System

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Development of an Innovative Micro Capacitive Humidity Sensor With Double Polyimide Films and Interlacing Out-of-plane Electrodes Structure

2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems ◽

10.1109/nems.2007.352125 ◽

2007 ◽

Cited By ~ 2

Author(s):

I-Yu Huang ◽

Yao-Yu Lee ◽

Chang-Yu Lin

Keyword(s):

Humidity Sensor ◽

Polyimide Films ◽

Out Of Plane ◽

Capacitive Humidity Sensor

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Fabrication of Nanostructured Metal Oxide Thin Film Capacitive Humidity Sensor

Metal and Metal Oxides for Energy and Electronics - Environmental Chemistry for a Sustainable World ◽

10.1007/978-3-030-53065-5_10 ◽

2020 ◽

pp. 355-374

Author(s):

Anwar Ulla Khan ◽

Lokesh Kumar ◽

Tarikul Islam ◽

Mohammad Ehtisham Khan

Keyword(s):

Thin Film ◽

Metal Oxide ◽

Humidity Sensor ◽

Oxide Thin Film ◽

Metal Oxide Thin Film ◽

Nanostructured Metal ◽

Capacitive Humidity Sensor

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Capacitive humidity sensor using a polyimide sensing film

Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS 2003. ◽

10.1109/dtip.2003.1287041 ◽

2004 ◽

Cited By ~ 3

Author(s):

J. Laconte ◽

V. Wilmart ◽

J.-P. Raskin ◽

D. Flandre

Keyword(s):

Humidity Sensor ◽

Capacitive Humidity Sensor

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