Out-of-plane spiral-coil inductor self-assembled by locally controlled bimorph actuation
2020 ◽
Vol 8
(10)
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pp. 3527-3535
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Keyword(s):
2008 ◽
Vol 17
(04)
◽
pp. 451-463
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Keyword(s):
Keyword(s):
2016 ◽
Vol 63
(5)
◽
pp. 2023-2028
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