Complementary metal-oxide semiconductor-compatible silicon carbide pressure sensors based on bulk micromachining
2009 ◽
Vol 48
(4)
◽
pp. 04C087
◽
2002 ◽
Vol 41
(Part 2, No. 8B)
◽
pp. L919-L921
◽
2011 ◽
pp. n/a-n/a
◽
1998 ◽
Vol 37
(Part 1, No. 3B)
◽
pp. 1050-1053
◽