Materials in semiconductor processing for high speed circuits: from electrical to optical circuits

2005 ◽  
Vol 152 (5) ◽  
pp. 523
Author(s):  
I. Banerjee ◽  
M. Morse ◽  
J.-M. Verdiell ◽  
D. Docter
Keyword(s):  
High Speed ◽  
Semiconductor Processing ◽  
Optical Circuits

Effect of Surfactant in Gas Dissolved Cleaning Solutions on Acoustic Bubble Dynamics

2021 ◽  
Vol 314 ◽  
pp. 197-201
Author(s):  
So Young Han ◽  
Nagendra Prasad Yerriboina ◽  
Bichitra Nanda Sahoo ◽  
Bong Kyun Kang ◽  
Andreas Klipp ◽  
...  
Keyword(s):  
Sodium Dodecyl Sulfate ◽  
Anionic Surfactant ◽  
High Speed ◽  
Bubble Dynamics ◽  
Sodium Dodecyl ◽  
High Speed Camera ◽  
Semiconductor Processing ◽  
Megasonic Cleaning ◽  
Bubble Cavitation ◽  
Bubble Characteristics

Megasonic cleaning is one of the promising technologies to remove the particles during semiconductor processing. Acoustic bubble cavitation plays a key role in removing the particles. In this work, the effect of an anionic surfactant sodium dodecyl sulfate (SDS) on a bubble in the presence of hydrogen dissolved DIW water was studied. The bubble dynamics were observed using a high-speed camera. It was found that with the increase of surfactant the bubble characteristics were changed very significantly. Several parameters affecting the bubble dynamics were investigated.

Study the Coupled-Cavity Waveguides Photonic Crystal Power Splitter

2014 ◽  
Vol 900 ◽  
pp. 222-225 ◽  
Author(s):  
Yan Bin Chen ◽  
Xu Ming Xu ◽  
Wei Li
Keyword(s):  
Photonic Crystal ◽  
Electromagnetic Waves ◽  
High Speed ◽  
Optical Signals ◽  
Power Splitter ◽  
Guided Mode ◽  
Propagation Analysis ◽  
Integrated Optical ◽  
Optical Circuits ◽  
Coupled Cavity

We propose a photonic crystal power splitter that allows the electromagnetic waves with a phase shift of 1800between output signals. The splitter consists of two parallel coupled-cavity waveguides placed in proximity. On the basis of the guided mode propagation analysis method, the self-imaging effect is discussed for the case of symmetric incidence. The finite-difference time-domain method is used to simulate the propagation of the beam and experimentally demonstrated. The results show that both output paths have the same physical length, the two output signals are synchronized. The splitter is very attractive for splitting high-speed optical signals in integrated optical circuits.

scholarly journals Scheduling and Transport for File Transfers on High-Speed Optical Circuits

2003 ◽  
Vol 1 (4) ◽  
pp. 395-405 ◽  
Author(s):  
Malathi Veeraraghavan ◽  
Xuan Zheng ◽  
Wu-chun Feng ◽  
Hojun Lee ◽  
Edwin K.P. Chong ◽  
...  
Keyword(s):  
High Speed ◽  
File Transfers ◽  
Optical Circuits

Microfabrication research at the National Submicron Facility

1983 ◽  
Vol 41 ◽  
pp. 86-89
Author(s):  
E.D. Wolf
Keyword(s):  
Integrated Circuits ◽  
Particle Physics ◽  
High Speed ◽  
New Technology ◽  
High Energy ◽  
High Energy Particle ◽  
New Science ◽  
Wide Range ◽  
Intermediate Domain ◽  
Circuit Function

Most microelectronics devices and circuits operate faster, consume less power, execute more functions and cost less per circuit function when the feature-sizes internal to the devices and circuits are made smaller. This is part of the stimulus for the Very High-Speed Integrated Circuits (VHSIC) program. There is also a need for smaller, more sensitive sensors in a wide range of disciplines that includes electrochemistry, neurophysiology and ultra-high pressure solid state research. There is often fundamental new science (and sometimes new technology) to be revealed (and used) when a basic parameter such as size is extended to new dimensions, as is evident at the two extremes of smallness and largeness, high energy particle physics and cosmology, respectively. However, there is also a very important intermediate domain of size that spans from the diameter of a small cluster of atoms up to near one micrometer which may also have just as profound effects on society as “big” physics.

Vacuum System to Minimize the Specimen Contamination of High-Performance EM

1977 ◽  
Vol 35 ◽  
pp. 68-69
Author(s):  
N. Yoshimura ◽  
K. Shirota ◽  
T. Etoh
Keyword(s):  
Electron Microscope ◽  
High Speed ◽  
High Performance ◽  
High Vacuum ◽  
Vacuum System ◽  
Pump System ◽  
Pumping System ◽  
Diffusion Pump ◽  
Almost All ◽  
Cascade Type

One of the most important requirements for a high-performance EM, especially an analytical EM using a fine beam probe, is to prevent specimen contamination by providing a clean high vacuum in the vicinity of the specimen. However, in almost all commercial EMs, the pressure in the vicinity of the specimen under observation is usually more than ten times higher than the pressure measured at the punping line. The EM column inevitably requires the use of greased Viton O-rings for fine movement, and specimens and films need to be exchanged frequently and several attachments may also be exchanged. For these reasons, a high speed pumping system, as well as a clean vacuum system, is now required. A newly developed electron microscope, the JEM-100CX features clean high vacuum in the vicinity of the specimen, realized by the use of a CASCADE type diffusion pump system which has been essentially improved over its predeces- sorD employed on the JEM-100C.

The on-line use of histogram data for high-speed correction and alignment of electron microscope images

1984 ◽  
Vol 42 ◽  
pp. 556-557
Author(s):  
William Krakow
Keyword(s):  
Power Spectrum ◽  
High Speed ◽  
Direct Memory Access ◽  
Digital Television ◽  
Contrast Transfer Function ◽  
The Past ◽  
High Resolution Tem ◽  
On Line ◽  
Correction Of Astigmatism ◽  
The Fourier Transform

In the past few years on-line digital television frame store devices coupled to computers have been employed to attempt to measure the microscope parameters of defocus and astigmatism. The ultimate goal of such tasks is to fully adjust the operating parameters of the microscope and obtain an optimum image for viewing in terms of its information content. The initial approach to this problem, for high resolution TEM imaging, was to obtain the power spectrum from the Fourier transform of an image, find the contrast transfer function oscillation maxima, and subsequently correct the image. This technique requires a fast computer, a direct memory access device and even an array processor to accomplish these tasks on limited size arrays in a few seconds per image. It is not clear that the power spectrum could be used for more than defocus correction since the correction of astigmatism is a formidable problem of pattern recognition.

Structural changes in silicon-on-insulator material during post-implantation annealing

1986 ◽  
Vol 44 ◽  
pp. 736-737
Author(s):  
C. O. Jung ◽  
S. J. Krause ◽  
S.R. Wilson
Keyword(s):  
Integrated Circuits ◽  
Oxide Layer ◽  
High Speed ◽  
Structural Changes ◽  
Device Fabrication ◽  
Silicon On Insulator ◽  
High Quality ◽  
Radiation Hardened ◽  
Post Implantation ◽  
Very High

Silicon-on-insulator (SOI) structures have excellent potential for future use in radiation hardened and high speed integrated circuits. For device fabrication in SOI material a high quality superficial Si layer above a buried oxide layer is required. Recently, Celler et al. reported that post-implantation annealing of oxygen implanted SOI at very high temperatures would eliminate virtually all defects and precipiates in the superficial Si layer. In this work we are reporting on the effect of three different post implantation annealing cycles on the structure of oxygen implanted SOI samples which were implanted under the same conditions.

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