Spurious mode suppression in electrostatic comb-drive X-Y microactuators
2016 ◽
Vol 25
(3)
◽
pp. 450-458
◽
2007 ◽
Vol 271
(2)
◽
pp. 424-429
◽
1998 ◽
Vol 37
(Part 1, No. 9B)
◽
pp. 5318-5321
◽
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