scholarly journals Generation of two‐dimensional electron gas to normally depleted AlGaN/GaN hetero‐interface by SiO 2 deposition and subsequent high‐temperature annealing

2021 ◽  
Author(s):  
T. Nanjo ◽  
H. Koyama ◽  
T. Imazawa ◽  
A. Kiyoi ◽  
A. Imai ◽  
...  
Keyword(s):  
High Temperature ◽  
Electron Gas ◽  
Two Dimensional ◽  
High Temperature Annealing ◽  
Dimensional Electron ◽  
Two Dimensional Electron Gas ◽  
Dimensional Electron Gas
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