High temperature performance of recessed gate GaN MESFETs fabricated using photoelectrochemical etching process

2000 ◽  
Vol 36 (3) ◽  
pp. 265 ◽  
Author(s):  
Won Sang Lee ◽  
Yoon Ho Choi ◽  
Ki Woong Chung ◽  
Dong Chan Moon ◽  
Moo Whan Shin
Keyword(s):  
High Temperature ◽  
Etching Process ◽  
Photoelectrochemical Etching ◽  
Temperature Performance ◽  
Recessed Gate

Recessed gate GaN MESFETs fabricated by the photoelectrochemical etching process

1999 ◽  
Vol 572 ◽  
Author(s):  
Won Sang Lee ◽  
Yoon Ho Choi ◽  
Ki Woong Chung ◽  
Moo Whan Shin ◽  
Dong Chan Moon
Keyword(s):  
Electrochemical Etching ◽  
Etching Rate ◽  
Drain Current ◽  
Etching Process ◽  
Device Performance ◽  
High Activation ◽  
Band Bending ◽  
Photoelectrochemical Etching ◽  
Characteristic Frequencies ◽  
Recessed Gate

ABSTRACTA new photo-electrochemical etching method was developed and used to fabricate GaN MESFETs. The etching process uses photoresist for masking illumination and the etchant is KOH based. The etching rate with 1.0 mol% of KOH for n-GaN is as high as 1600 Å/min under the Hg illumination of 35 mW/cm/2. The MESFET saturates at VDS = 4 V and pinches off at VGS = −3 V. The maximum drain current of the device is 230 mA/mmn at 300 K and the value is remained almost same for 500 K operation. The characteristic frequencies, fT and fmax, are 6.35 GHz and 10.25 GHz, respectively. Insensitivity of the device performance to temperature was attributed to the defect-related high activation energy of dopants for ionization and band-bending at the subgrain boundaries in GaN thin films.

ALLEGHENY LUDLUM AL276

Alloy Digest ◽  
1996 ◽  
Vol 45 (1) ◽  
Keyword(s):  
Corrosion Resistance ◽  
High Temperature ◽  
Power Plant ◽  
Physical Properties ◽  
Surface Treatment ◽  
Tensile Properties ◽  
Crevice Corrosion ◽  
Heat Treating ◽  
Chemical Plants ◽  
Temperature Performance

Abstract Allegheny Ludlum AL276 is widely used in the most severe environments found in chemical plants and in power plant desulfurization systems. The high molybdenum level with tungsten gives excellent pitting and crevice corrosion resistance. This datasheet provides information on composition, physical properties, hardness, elasticity, and tensile properties. It also includes information on low and high temperature performance, and corrosion resistance as well as forming, heat treating, joining, and surface treatment. Filing Code: Ni-497. Producer or source: Allegheny Ludlum Corporation.

NICROFER 5520 Co

Alloy Digest ◽  
1995 ◽  
Vol 44 (3) ◽  
Keyword(s):  
High Temperature ◽  
Chemical Composition ◽  
Physical Properties ◽  
Tensile Properties ◽  
High Temperatures ◽  
Heat Treating ◽  
High Temperature Corrosion ◽  
Creep Properties ◽  
Nickel Chromium ◽  
Temperature Performance

Abstract NICROFER 5520 Co is a nickel-chromium-cobalt-molybdenum alloy with excellent strength and creep properties up to high temperatures. Due to its balanced chemical composition the alloy shows outstanding resistance to high temperature corrosion in the form of oxidation and carburization. This datasheet provides information on composition, physical properties, elasticity, and tensile properties. It also includes information on high temperature performance as well as forming, heat treating, machining, and joining. Filing Code: Ni-480. Producer or source: VDM Technologies Corporation.

ALTEMP HX

Alloy Digest ◽  
1993 ◽  
Vol 42 (10) ◽  
Keyword(s):  
Heat Treatment ◽  
Solid Solution ◽  
Fracture Toughness ◽  
Corrosion Resistance ◽  
High Temperature ◽  
Base Alloy ◽  
Heat Treating ◽  
Nickel Base Alloy ◽  
Temperature Performance ◽  
Nickel Base

Abstract ALTEMP HX is an austenitic nickel-base alloy designed for outstanding oxidation and strength at high temperatures. The alloy is solid-solution strengthened. Applications include uses in the aerospace, heat treatment and petrochemical markets. This datasheet provides information on composition, physical properties, elasticity, and tensile properties as well as fracture toughness and creep. It also includes information on low and high temperature performance, and corrosion resistance as well as forming, heat treating, and joining. Filing Code: Ni-442. Producer or source: Allegheny Ludlum Corporation.

DELORO 716 PM

Alloy Digest ◽  
1993 ◽  
Vol 42 (7) ◽  
Keyword(s):  
Wear Resistance ◽  
High Temperature ◽  
Physical Properties ◽  
Base Alloy ◽  
Nickel Base Alloy ◽  
Temperature Performance ◽  
Nickel Base

Abstract DELORO 716 PM is a nickel-base alloy recommended for handling conditions of wear, erosion, heat and corrosion when impact is also a consideration. This datasheet provides information on composition, physical properties, and hardness. It also includes information on high temperature performance and wear resistance as well as machining and joining. Filing Code: Ni-435. Producer or source: Deloro Stellite Inc.

NILO ALLOY 36

Alloy Digest ◽  
1987 ◽  
Vol 36 (8) ◽  
Keyword(s):  
Thermal Expansion ◽  
Corrosion Resistance ◽  
High Temperature ◽  
Physical Properties ◽  
Surface Treatment ◽  
Constant Coefficient ◽  
Coefficient Of Thermal Expansion ◽  
Heat Treating ◽  
Temperature Performance ◽  
Iron Nickel

Abstract NILO alloy 36 is a binary iron-nickel alloy having a very low and essentially constant coefficient of thermal expansion at atmospheric temperatures. This datasheet provides information on composition, physical properties, elasticity, and tensile properties. It also includes information on high temperature performance and corrosion resistance as well as forming, heat treating, machining, joining, and surface treatment. Filing Code: Fe-79. Producer or source: Inco Alloys International Inc..

UNITEMP N-155

Alloy Digest ◽  
1971 ◽  
Vol 20 (12) ◽  
Keyword(s):  
Fracture Toughness ◽  
Corrosion Resistance ◽  
High Temperature ◽  
Physical Properties ◽  
Surface Treatment ◽  
Wide Temperature Range ◽  
Heat Treating ◽  
Combustion Chambers ◽  
Temperature Performance ◽  
Oxidation And Corrosion

Abstract UNITEMP N-155 is an iron-base austenitic alloy used over a wide temperature range from subzero to about 1800 or 1900 F. It has relatively good oxidation and corrosion resistance. It is used in such applications as turbine rotors, shafts and blades, afterburner parts, nozzles and combustion chambers. This datasheet provides information on composition, physical properties, hardness, elasticity, and tensile properties as well as fracture toughness, creep, and fatigue. It also includes information on high temperature performance as well as forming, heat treating, joining, and surface treatment. Filing Code: Fe-48. Producer or source: Cyclops Corporation.

PYROTOOL A

Alloy Digest ◽  
1971 ◽  
Vol 20 (4) ◽  
Keyword(s):  
Corrosion Resistance ◽  
High Temperature ◽  
Physical Properties ◽  
Surface Treatment ◽  
Tensile Properties ◽  
High Strength ◽  
Heat Treating ◽  
Good Ductility ◽  
Extrusion Dies ◽  
Temperature Performance

Abstract PYROTOOL A has been designed to display high strength and good ductility at temperatures up to 1200 F. It is used for high-temperature tooling, extrusion dies, liners, dummy blocks, forging dies, mandrels, holders, etc. This datasheet provides information on composition, physical properties, hardness, elasticity, and tensile properties. It also includes information on high temperature performance and corrosion resistance as well as forming, heat treating, machining, joining, and surface treatment. Filing Code: Fe-47. Producer or source: Carpenter.

UNISPAN LR35

Alloy Digest ◽  
1971 ◽  
Vol 20 (1) ◽  
Keyword(s):  
Thermal Expansion ◽  
Corrosion Resistance ◽  
High Temperature ◽  
Physical Properties ◽  
Surface Treatment ◽  
Tensile Properties ◽  
Coefficient Of Thermal Expansion ◽  
Heat Treating ◽  
Temperature Performance ◽  
Operational Level

Abstract UNISPAN LR35 offers the lowest coefficient of thermal expansion of any alloy now available. It is a low residual modification of UNISPAN 36 for fully achieving the demanding operational level of precision equipment. This datasheet provides information on composition, physical properties, hardness, and tensile properties. It also includes information on high temperature performance and corrosion resistance as well as forming, heat treating, machining, and surface treatment. Filing Code: Fe-46. Producer or source: Cyclops Corporation.

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