Sensitivity enhancement in lateral capacitive accelerometers by structure width optimsation

1997 ◽  
Vol 33 (5) ◽  
pp. 384 ◽  
Author(s):  
J. Ramos
2011 ◽  
Vol 131 (7) ◽  
pp. 235-239 ◽  
Author(s):  
Kaoru Yamashita ◽  
Tomoya Yoshizaki ◽  
Minoru Noda ◽  
Masanori Okuyama

Sign in / Sign up

Export Citation Format

Share Document