Piezoresistive effect in vertical Hall cell

1993 ◽  
Vol 29 (4) ◽  
pp. 381 ◽  
Author(s):  
K. Maenaka
2021 ◽  
Author(s):  
Thanh Viet Nguyen ◽  
Toan Dinh ◽  
Hoang-Phuong Phan ◽  
Tuan Anh Pham ◽  
Van Thanh Dau ◽  
...  

Piezoresistive effect has been a dominant mechanical sensing principle that has been widely employed in a range of sensing applications. This transducing concept still receives great attentions because of the...


2012 ◽  
Vol 490-495 ◽  
pp. 499-503
Author(s):  
Ping Li ◽  
Yun Bo Shi ◽  
Jun Liu ◽  
Shi Qiao Gao

This paper presents a novel MEMS high g acceleration sensor based on piezoresistive effect. For the designed sensor structure, the formula of stress, natural frequency and damping was derived in theory, and the resonant frequency can up to 500kHz. After the structure parameters were designed, the sensor was fabricated by the standard processing technology, and the sensitivity was tested by Hopkinson bar. According to the experimental results, the sensitivity of the high g acceleration sensor is 0.125μV/g at the impact load of 164,002g.


Micromachines ◽  
2021 ◽  
Vol 12 (2) ◽  
pp. 216
Author(s):  
Yongwei Li ◽  
Ting Liang ◽  
Cheng Lei ◽  
Qiang Li ◽  
Zhiqiang Li ◽  
...  

In this study, a preparation method for the high-temperature pressure sensor based on the piezoresistive effect of p-type SiC is presented. The varistor with a positive trapezoidal shape was designed and etched innovatively to improve the contact stability between the metal and SiC varistor. Additionally, the excellent ohmic contact was formed by annealing at 950 °C between Ni/Al/Ni/Au and p-type SiC with a doping concentration of 1018cm−3. The aging sensor was tested for varistors in the air of 25 °C–600 °C. The resistance value of the varistors initially decreased and then increased with the increase of temperature and reached the minimum at ~450 °C. It could be calculated that the varistors at ~100 °C exhibited the maximum temperature coefficient of resistance (TCR) of ~−0.35%/°C. The above results indicated that the sensor had a stable electrical connection in the air environment of ≤600 °C. Finally, the encapsulated sensor was subjected to pressure/depressure tests at room temperature. The test results revealed that the sensor output sensitivity was approximately 1.09 mV/V/bar, which is better than other SiC pressure sensors. This study has a great significance for the test of mechanical parameters under the extreme environment of 600 °C.


2008 ◽  
Vol 17 (1) ◽  
pp. 226-235 ◽  
Author(s):  
G.K. Johns ◽  
L.L. Howell ◽  
B.D. Jensen ◽  
T.W. McLain

Author(s):  
John Edmiston ◽  
Yuri M. Shkel

A shear piezoresistive effect has been observed for micrographite particles suspended in uncured silicone elastomer. A phenomenological formulation of piezoresistivity is presented and an experimental approach is discussed within this paper. The experimental objective is to extract two material parameters, fully describing the piezoresistance effect in deformed isotropic materials. A rheometer in the cone-and-plate configuration provides well-defined oscillatory shear flow of the suspension; it also measures rheological characteristics of the suspension. The piezoresistive response is probed using interdigitated electrodes, which are attached to the rheometer plate. The electrodes are arranged in parallel-to-flow and perpendicular-to-flow orientations. The signal acquired from two such orthogonal electrode pairs can be combined in a way to exclude any contribution of volumetric deformations to the piezoresistance signal. The experimental results indicate a second harmonic relationship between the mechanical oscillation and the resistive response. These two-probe measurement results represent the first observations of a non-volumetric deformation contribution to the piezoresistivity of viscoelastic liquid suspensions.


RSC Advances ◽  
2017 ◽  
Vol 7 (33) ◽  
pp. 20422-20429 ◽  
Author(s):  
Tongfei Wu ◽  
Biqiong Chen

Viscoelastic rubber reinforced by multiwalled carbon nanotubes exhibited rapid, autonomous, mechanically and electrically self-healing properties and piezoresistive behavior.


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