GaAs/AlGaAs ridge waveguide laser monolithically integrated with a photodetector using ion beam etching

1987 ◽  
Vol 23 (16) ◽  
pp. 855 ◽  
Author(s):  
N. Bouadma ◽  
S. Grosmaire ◽  
F. Brillouet
Keyword(s):  
Ion Beam ◽  
Ridge Waveguide ◽  
Waveguide Laser ◽  
Ion Beam Etching ◽  
Monolithically Integrated ◽  
Ridge Waveguide Laser

Multichamber Rie Processing for Ingaasp Ridge Waveguide Laser Arrays

1991 ◽  
Vol 240 ◽  
Author(s):  
Mark A. Rothman ◽  
John A. Thompson ◽  
Craig A. Armiento
Keyword(s):  
Optoelectronic Devices ◽  
Single Mode ◽  
Ridge Waveguide ◽  
Cross Contamination ◽  
Waveguide Laser ◽  
Laser Arrays ◽  
Monolithically Integrated ◽  
High Degree ◽  
Passive Alignment ◽  
Ridge Waveguide Laser

ABSTRACTThe fabrication of devices based on III-V materials often requires a number of different reactive ion etching (RIE) processes that must be implemented sequentially. These processes are typically carried out in different RIE systems to avoid cross contamination. In this paper, we describe a multichamber RIE system configured to provide several sequential etch processes required for the fabrication of optoelectronic devices. This system has been used to fabricate InGaAsP/lnP ridge waveguide laser arrays with etched mechanical features that enable passive alignment of the lasers with single-mode fibers. Laser arrays with threshold currents as low as 20 mA have been processed with a high degree of uniformity. This system has also been used to develop a laser facet etch process based on CH4/H2/Ar chemistry. This process has been used to fabricate lasers with monolithically integrated rear facet monitors. These etched facet lasers have threshold currents comparable to lasers with both facets cleaved.

Low-threshold inGaAsP ridge-waveguide laser fabricated by a new contacting system

1986 ◽  
Vol 22 (10) ◽  
pp. 526-528
Author(s):  
G. Müller ◽  
E. Hartl ◽  
M. Honsberg
Keyword(s):  
Ridge Waveguide ◽  
Waveguide Laser ◽  
Low Threshold ◽  
Ridge Waveguide Laser

Metal-clad ridge waveguide laser modes

1988 ◽  
Vol 135 (1) ◽  
pp. 79
Author(s):  
S.J. Al-Bader ◽  
H.A. Jamid
Keyword(s):  
Ridge Waveguide ◽  
Waveguide Laser ◽  
Laser Modes ◽  
Ridge Waveguide Laser
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