Thin-film transmission lines using cyclic olefin copolymer for millimetre-wave and terahertz integrated circuits

2011 ◽  
Vol 47 (7) ◽  
pp. 453 ◽  
Author(s):  
E. Peytavit ◽  
C. Donche ◽  
S. Lepilliet ◽  
G. Ducournau ◽  
J.-F. Lampin
Keyword(s):  
Thin Film ◽  
Integrated Circuits ◽  
Transmission Lines ◽  
Cyclic Olefin Copolymer ◽  
Millimetre Wave ◽  
Cyclic Olefin

scholarly journals Spectroscopic ellipsometry of thin film cyclic olefin copolymer for use in long-wave infrared metasurfaces

2021 ◽  
Vol 11 (11) ◽  
pp. 3688
Author(s):  
Jeffrey D’Archangel ◽  
Benjamin Cerjan ◽  
Lou Deguzman ◽  
Mark Griep ◽  
Glenn Boreman
Keyword(s):  
Thin Film ◽  
Spectroscopic Ellipsometry ◽  
Cyclic Olefin Copolymer ◽  
Cyclic Olefin ◽  
Long Wave ◽  
Long Wave Infrared

Surface functionalization of cyclic olefin copolymer (COC) with evaporated TiO2 thin film

2016 ◽  
Vol 363 ◽  
pp. 670-675 ◽  
Author(s):  
Lamia El Fissi ◽  
Denis Vandormael ◽  
Laurent Houssiau ◽  
Laurent A. Francis
Keyword(s):  
Thin Film ◽  
Surface Functionalization ◽  
Tio2 Thin Film ◽  
Cyclic Olefin Copolymer ◽  
Cyclic Olefin

The Structure and Properties of MoSi2 Thin Film in Mos Process

1980 ◽  
Vol 38 ◽  
pp. 326-327
Author(s):  
C.K. Wu ◽  
P. Chang ◽  
N. Godinho
Keyword(s):  
Thin Film ◽  
Integrated Circuits ◽  
High Performance ◽  
Large Scale ◽  
Process Development ◽  
Structure And Properties ◽  
Metal Silicides ◽  
High Oxidation ◽  
Important Approach ◽  
High Oxidation Resistance

Recently, the use of refractory metal silicides as low resistivity, high temperature and high oxidation resistance gate materials in large scale integrated circuits (LSI) has become an important approach in advanced MOS process development (1). This research is a systematic study on the structure and properties of molybdenum silicide thin film and its applicability to high performance LSI fabrication.

Effect of the number of arms on the mechanical properties of a star-shaped cyclic olefin copolymer

2019 ◽  
Vol 10 (41) ◽  
pp. 5578-5583 ◽  
Author(s):  
Takumitsu Kida ◽  
Ryo Tanaka ◽  
Koh-hei Nitta ◽  
Takeshi Shiono
Keyword(s):  
Mechanical Properties ◽  
Thermal Properties ◽  
Physical Properties ◽  
Secondary Amine ◽  
Aggregation Number ◽  
Drastic Change ◽  
Cyclic Olefin Copolymer ◽  
Cyclic Olefin

The increase of aggregation number in a star-shaped cyclic olefin copolymer was succeeded by using a triazine-based secondary amine, which caused a drastic change in physical properties without changing the thermal properties.

scholarly journals Experimental Study on the Thickness-Dependent Hardness of SiO2 Thin Films Using Nanoindentation

Coatings ◽  
2020 ◽  
Vol 11 (1) ◽  
pp. 23
Author(s):  
Weiguang Zhang ◽  
Jijun Li ◽  
Yongming Xing ◽  
Xiaomeng Nie ◽  
Fengchao Lang ◽  
...  
Keyword(s):  
Thin Film ◽  
Thin Films ◽  
Grain Size ◽  
Integrated Circuits ◽  
Film Thickness ◽  
Depth Range ◽  
Micro Electro Mechanical Systems ◽  
Si Substrates ◽  
Sio2 Thin Film ◽  
Average Grain Size

SiO2 thin films are widely used in micro-electro-mechanical systems, integrated circuits and optical thin film devices. Tremendous efforts have been devoted to studying the preparation technology and optical properties of SiO2 thin films, but little attention has been paid to their mechanical properties. Herein, the surface morphology of the 500-nm-thick, 1000-nm-thick and 2000-nm-thick SiO2 thin films on the Si substrates was observed by atomic force microscopy. The hardnesses of the three SiO2 thin films with different thicknesses were investigated by nanoindentation technique, and the dependence of the hardness of the SiO2 thin film with its thickness was analyzed. The results showed that the average grain size of SiO2 thin film increased with increasing film thickness. For the three SiO2 thin films with different thicknesses, the same relative penetration depth range of ~0.4–0.5 existed, above which the intrinsic hardness without substrate influence can be determined. The average intrinsic hardness of the SiO2 thin film decreased with the increasing film thickness and average grain size, which showed the similar trend with the Hall-Petch type relationship.

Sign in / Sign up

Export Citation Format

Share Document