Cross-coupling control for synchronized scan of experimental wafer and reticle stage

2006 ◽  
Author(s):  
Wang Chunhong ◽  
Yin Wensheng ◽  
Duan Guanghong
Keyword(s):  
Cross Coupling ◽  
Cross Coupling Control

Cross-Coupling Controller for Five Degree-of-Freedom Coplanar Nanostage

2013 ◽  
Vol 284-287 ◽  
pp. 1788-1793
Author(s):  
Van Tsai Liu
Keyword(s):  
Tracking Control ◽  
Tracking Error ◽  
Cross Coupling ◽  
Degree Of Freedom ◽  
Creep Model ◽  
Contour Error ◽  
Viscoelastic Creep ◽  
Control Scheme ◽  
Optimization Parameters ◽  
Cross Coupling Control

The proposed approach is to design a tracking controller for five degree-of-freedom coplanar nanostage which can provide high precision applications. This study propose a viscoelastic creep model, it was modeled as a series connection of springs and dampers to describe the creep effect. Then, utilize a PI controller using Taguchi method to search the optimization parameters to suppress the tracking error. Finally, a cross-coupling control scheme is proposed to eliminate the contour error which is typical in dual-axes tracking control problem. The developed approaches are numerically and experimentally verified which demonstrate performance and applicability.

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