Miniature Pressure Sensor for Harsh Environments

2016 ◽  
Author(s):  
A. Schricker ◽  
L. Ladinig
Keyword(s):  
Pressure Sensor ◽  
Harsh Environments

scholarly journals A Ceramic Diffusion Bonding Method for Passive LC High-Temperature Pressure Sensor

Sensors ◽  
2018 ◽  
Vol 18 (8) ◽  
pp. 2676
Author(s):  
Chen Li ◽  
Boshan Sun ◽  
Yanan Xue ◽  
Jijun Xiong
Keyword(s):  
High Temperature ◽  
Pressure Sensor ◽  
Pressure Sensors ◽  
Alumina Ceramic ◽  
Harsh Environments ◽  
Ceramic Substrates ◽  
Integrated Technology ◽  
All Ceramic ◽  
Test Platform ◽  
Bonding Method

Alumina ceramic is a highly promising material for fabricating high-temperature pressure sensors. In this paper, a direct bonding method for fabricating a sensitive cavity with alumina ceramic is presented. Alumina ceramic substrates were bonded together to form a sensitive cavity for high-temperature pressure environments. The device can sense pressure parameters at high temperatures. To verify the sensitivity performance of the fabrication method in high-temperature environments, an inductor and capacitor were integrated on the ceramic substrate with the fabricated sensitive cavity to form a wireless passive LC pressure sensor with thick-film integrated technology. Finally, the fabricated sensor was tested using a system test platform. The experimental results show that the sensor can realize pressure measurements above 900 °C, confirming that the fabricated sensitive cavity has excellent sealing properties. Therefore, the direct bonding method can potentially be used for developing all-ceramic high-temperature pressure sensors for application in harsh environments.

scholarly journals A Novel Interdigital Capacitor Pressure Sensor Based on LTCC Technology

2014 ◽  
Vol 2014 ◽  
pp. 1-6 ◽  
Author(s):  
Qiulin Tan ◽  
Mingliang Yang ◽  
Tao Luo ◽  
Wei Liu ◽  
Chao Li ◽  
...  
Keyword(s):  
High Temperature ◽  
Pressure Sensor ◽  
Screen Printing ◽  
Room Temperature ◽  
Mutual Inductance ◽  
Ceramic Technology ◽  
Harsh Environments ◽  
Chemical Corrosion ◽  
Interdigital Capacitor ◽  
Lc Circuit

A novel passive wireless pressure sensor is proposed based on LTCC (low temperature cofired ceramic) technology. The sensor employs a passive LC circuit, which is composed of a variable interdigital capacitor and a constant inductor. The inductor and capacitor were fabricated by screen-printing. Pressure measurement is tested using a wireless mutual inductance coupling method. The experimental sensitivity of the sensor is about 273.95 kHz/bar below 2 bar. Experimental results show that the sensor can be read out wirelessly by external antenna at 600°C. The max readout distance is 3 cm at room temperature. The sensors described can be applied for monitoring of gas pressure in harsh environments, such as environment with high temperature and chemical corrosion.

Capacitive differential pressure sensor for harsh environments

2000 ◽  
Vol 83 (1-3) ◽  
pp. 30-33 ◽  
Author(s):  
S.T Moe ◽  
K Schjølberg-Henriksen ◽  
D.T Wang ◽  
E Lund ◽  
J Nysæther ◽  
...  
Keyword(s):  
Pressure Sensor ◽  
Differential Pressure ◽  
Harsh Environments ◽  
Differential Pressure Sensor

scholarly journals A Passive Wireless Microelectromechanical Pressure Sensor for Harsh Environments

2018 ◽  
Vol 27 (1) ◽  
pp. 73-85 ◽  
Author(s):  
John E. Rogers ◽  
Yong-Kyu Yoon ◽  
Mark Sheplak ◽  
Jack W. Judy
Keyword(s):  
Pressure Sensor ◽  
Harsh Environments

scholarly journals Hierarchical network enabled flexible textile pressure sensors with ultra-high sensitivity, ultra-wide linearity and high-temperature resistance

2021 ◽  
Author(s):  
Meiling Jia ◽  
Chenghan Yi ◽  
Yankun Han ◽  
Xin Li ◽  
Guoliang Xu ◽  
...  
Keyword(s):  
High Pressure ◽  
High Temperature ◽  
Pressure Sensor ◽  
High Performance ◽  
Full Range ◽  
Pressure Sensors ◽  
Fiber Surface ◽  
High Sensitivity ◽  
Harsh Environments ◽  
Point To Point

Abstract Thin, lightweight, and flexible textile pressure sensors with the ability to precisely detect the full range of faint pressure (< 100 Pa), low pressure (in the range of KPa) and high pressure (in the range of MPa) are in significant demand to meet the requirements for applications in daily activities and more meaningfully in some harsh environments, such as high temperature and high pressure. However, it is still a major challenge to fulfill these requirements simultaneously in a single pressure sensor. Herein, a high-performance pressure sensor enabled by polyimide fiber fabric with functionalized carbon-nanotube (PI/FCNT) is obtained via a facile electrophoretic deposition (EPD) approach. High-density FCNT is evenly wrapped and chemically bonded to the fiber surface during the EPD process, forming a conductive hierarchical fiber/FCNT matrix. Benefiting from the abundant yet firm contacting points, point-to-point contacting mode, and high elastic modulus of both PI and CNT, the proposed PI/FCNT pressure sensor exhibits ultra-high sensitivity (3.57 MPa− 1), ultra-wide linearity (3.24 MPa), exceptionally broad sensing range (~ 45 MPa), and long-term stability (> 4000 cycles). Furthermore, under a high working temperature of 200 ºC, the proposed sensor device still shows an ultra-high sensitivity of 2.64 MPa− 1 within a wide linear range of 7.2 MPa, attributing to its intrinsic high-temperature-resistant properties of PI and CNT. Thanks to these merits, the proposed PI/FCNT(EPD) pressure sensor could serve as an E-skin device to monitor the human physiological information, precisely detect tiny and extremely high pressure, and can be integrated into an intelligent mechanical hand to detect the contact force under high-temperature (> 300 ºC), endowing it with high applicability in the fields of real-time health monitoring, intelligent robots, and harsh environments.

Langasite SAW pressure sensor for harsh environments

2012 ◽  
Author(s):  
Scott C. Moulzolf ◽  
Roby Behanan ◽  
Robert J. Lad ◽  
Mauricio Pereira da Cunha
Keyword(s):  
Pressure Sensor ◽  
Harsh Environments

Flat electromagnetic pressure sensor for harsh environments

2001 ◽  
Vol 91 (1-2) ◽  
pp. 51-56 ◽  
Author(s):  
B.M Dutoit ◽  
Y Pilloud ◽  
F Elegibili ◽  
P.-A Besse ◽  
R.S Popovic
Keyword(s):  
Pressure Sensor ◽  
Harsh Environments ◽  
Electromagnetic Pressure

A novel temperature-insensitive optical fiber pressure sensor for harsh environments

2005 ◽  
Vol 17 (4) ◽  
pp. 870-872 ◽  
Author(s):  
Juncheng Xu ◽  
G. Pickrell ◽  
Xingwei Wang ◽  
Wei Peng ◽  
K. Cooper ◽  
...  
Keyword(s):  
Optical Fiber ◽  
Pressure Sensor ◽  
Harsh Environments
Sign in / Sign up

Export Citation Format

Share Document