Determination of trace impurities in organometallic semiconductor-grade reagents and process chemicals with electrothermal vaporization–inductively coupled plasma atomic emission spectrometry
1994 ◽
Vol 9
(10)
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pp. 1121-1128
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2010 ◽
Vol 95
(1)
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pp. 85-89
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1991 ◽
Vol 6
(8)
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pp. 623-626
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2000 ◽
Vol 367
(3)
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pp. 259-263
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