Further improvements in calibration techniques for depth profiling with glow discharge optical emission spectrometry

1990 ◽  
Vol 5 (6) ◽  
pp. 563 ◽  
Author(s):  
Arne Bengtson ◽  
Anders Eklund ◽  
Martin Lundholm ◽  
Ante Saric
Keyword(s):  
Glow Discharge ◽  
Depth Profiling ◽  
Optical Emission ◽  
Optical Emission Spectrometry ◽  
Emission Spectrometry ◽  
Calibration Techniques

scholarly journals Compositional depth profiling of diamond-like carbon layers by glow discharge optical emission spectroscopy

2016 ◽  
Vol 31 (11) ◽  
pp. 2207-2212 ◽  
Author(s):  
C. Schubert ◽  
V. Hoffmann ◽  
A. Kümmel ◽  
J. Sinn ◽  
M. Härtel ◽  
...  
Keyword(s):  
Glow Discharge ◽  
Emission Spectroscopy ◽  
Optical Emission Spectroscopy ◽  
Depth Profiling ◽  
Optical Emission ◽  
Optical Emission Spectrometry ◽  
Emission Spectrometry ◽  
Diamond Like Carbon ◽  
Compositional Depth Profiling

This article describes the compositional depth profiling (CDP) of diamond-like carbon (DLC) layers by Glow Discharge-Optical Emission Spectrometry (GD-OES).

scholarly journals Glow discharge optical emission spectrometry for quantitative depth profiling of CIGS thin-films

2019 ◽  
Vol 34 (6) ◽  
pp. 1233-1241 ◽  
Author(s):  
Tim Kodalle ◽  
Dieter Greiner ◽  
Varvara Brackmann ◽  
Karsten Prietzel ◽  
Anja Scheu ◽  
...  
Keyword(s):  
Thin Films ◽  
Glow Discharge ◽  
Depth Profiling ◽  
Optical Emission ◽  
Optical Emission Spectrometry ◽  
Emission Spectrometry ◽  
Depth Profiles ◽  
Energy Bandgap

The article demonstrates how quantitative compositional depth profiles of Cu(In,Ga)(S,Se)2 layers can be utilized to determine their energy bandgap distribution.

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