scholarly journals Electron beam lithography for direct patterning of MoS2 on PDMS substrates

RSC Advances ◽  
2021 ◽  
Vol 11 (32) ◽  
pp. 19908-19913
Author(s):  
Gil Jumbert ◽  
Marcel Placidi ◽  
Francesc Alzina ◽  
Clivia M. Sotomayor Torres ◽  
Marianna Sledzinska
Keyword(s):  
Electron Beam ◽  
Electron Beam Lithography ◽  
2D Materials ◽  
Direct Patterning

Precise patterning of 2D materials into micro- and nanostructures presents a considerable challenge and many efforts are dedicated to the development of processes alternative to the standard lithography.

scholarly journals Universal direct patterning of colloidal quantum dots by (extreme) ultraviolet and electron beam lithography

Nanoscale ◽  
2020 ◽  
Vol 12 (20) ◽  
pp. 11306-11316
Author(s):  
Christian D. Dieleman ◽  
Weiyi Ding ◽  
Lianjia Wu ◽  
Neha Thakur ◽  
Ivan Bespalov ◽  
...  
Keyword(s):  
Quantum Dots ◽  
Electron Beam ◽  
Electron Beam Lithography ◽  
Extreme Ultraviolet ◽  
Luminescent Properties ◽  
Colloidal Quantum Dots ◽  
Direct Patterning ◽  
One Step ◽  
Patterning Technique

A general, one-step patterning technique for colloidal quantum dots by direct optical or e-beam lithography. Photons (5.5–91.9 eV) and electrons (3 eV–50 kV) crosslink and immobilize QDs down to tens of nm while preserving the luminescent properties.

Direct patterning of highly-conductive graphene@copper composites using copper naphthenate as a resist for graphene device applications

Nanoscale ◽  
2017 ◽  
Vol 9 (43) ◽  
pp. 16755-16763 ◽  
Author(s):  
Kaixi Bi ◽  
Quan Xiang ◽  
Yiqin Chen ◽  
Huimin Shi ◽  
Zhiqin Li ◽  
...  
Keyword(s):  
Electron Beam ◽  
Electron Beam Lithography ◽  
Metal Deposition ◽  
Lithography Process ◽  
Direct Patterning ◽  
Copper Naphthenate ◽  
Device Applications ◽  
Lift Off ◽  
Copper Composite

We report an electron-beam lithography process to directly fabricate graphene@copper composite patterns without involving metal deposition, lift-off and etching processes.

scholarly journals Electron beam lithography and its use on 2D materials

2020 ◽  
Author(s):  
Vito Clericò ◽  
Mario Amado ◽  
Enrique Diez
Keyword(s):  
Electron Beam ◽  
Electron Beam Lithography ◽  
2D Materials

Direct Patterning of Zinc Sulfide on a Sub-10 Nanometer Scale via Electron Beam Lithography

ACS Nano ◽  
2017 ◽  
Vol 11 (10) ◽  
pp. 9920-9929 ◽  
Author(s):  
Mohammad S. M. Saifullah ◽  
Mohamed Asbahi ◽  
Maryam Binti-Kamran Kiyani ◽  
Sudhiranjan Tripathy ◽  
Esther A. H. Ong ◽  
...  
Keyword(s):  
Electron Beam ◽  
Zinc Sulfide ◽  
Electron Beam Lithography ◽  
Nanometer Scale ◽  
Direct Patterning
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