scholarly journals Highly-efficient growth of cobalt nanostructures using focused ion beam induced deposition under cryogenic conditions: application to electrical contacts on graphene, magnetism and hard masking.

2021 ◽  
Author(s):  
Alba Salvador-Porroche ◽  
Soraya Sangiao ◽  
Cesar Magen ◽  
Mariano Barrado ◽  
Patrick Philipp ◽  
...  
Keyword(s):  
Focused Ion Beam ◽  
Ion Beam ◽  
Electrical Contacts ◽  
Micro Scale ◽  
Emergent Technologies ◽  
Highly Efficient ◽  
Cryogenic Conditions ◽  
Cobalt Nanostructures

Emergent technologies are required in the field of nanoelectronics for improved contacts and interconnects at nano and micro-scale. In this work, we report a highly-efficient nanolithography process for the growth...

scholarly journals Comparison between Focused Electron/Ion Beam-Induced Deposition at Room Temperature and under Cryogenic Conditions

Micromachines ◽  
2019 ◽  
Vol 10 (12) ◽  
pp. 799 ◽  
Author(s):  
José De Teresa ◽  
Pablo Orús ◽  
Rosa Córdoba ◽  
Patrick Philipp
Keyword(s):  
Room Temperature ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Electrical Contacts ◽  
Precursor Material ◽  
Subsequent Exposure ◽  
Direct Growth ◽  
Low Charge ◽  
Process Complexity ◽  
Cryogenic Conditions

In this contribution, we compare the performance of Focused Electron Beam-induced Deposition (FEBID) and Focused Ion Beam-induced Deposition (FIBID) at room temperature and under cryogenic conditions (the prefix “Cryo” is used here for cryogenic). Under cryogenic conditions, the precursor material condensates on the substrate, forming a layer that is several nm thick. Its subsequent exposure to a focused electron or ion beam and posterior heating to 50 °C reveals the deposit. Due to the extremely low charge dose required, Cryo-FEBID and Cryo-FIBID are found to excel in terms of growth rate, which is typically a few hundred/thousand times higher than room-temperature deposition. Cryo-FIBID using the W(CO)6 precursor has demonstrated the growth of metallic deposits, with resistivity not far from the corresponding deposits grown at room temperature. This paves the way for its application in circuit edit and the fast and direct growth of micro/nano-electrical contacts with decreased ion damage. The last part of the contribution is dedicated to the comparison of these techniques with other charge-based lithography techniques in terms of the charge dose required and process complexity. The comparison indicates that Cryo-FIBID is very competitive and shows great potential for future lithography developments.

Interfacial Fracture Strength of Micro-Scale Si/Cu Components with Different Free-Edge Shape

2015 ◽  
Vol 665 ◽  
pp. 169-172
Author(s):  
Yoshimasa Takahashi ◽  
Hikaru Kondo ◽  
Kazuya Aihara ◽  
Masanori Takuma ◽  
Kenichi Saitoh ◽  
...  
Keyword(s):  
Focused Ion Beam ◽  
Ion Beam ◽  
Stress Singularity ◽  
Fracture Initiation ◽  
Interfacial Fracture ◽  
Free Edge ◽  
Stress Distributions ◽  
Micro Scale ◽  
Transmission Electron ◽  
The Difference

The strength against interfacial fracture initiation from a free-edge of Si/Cu micro-components was evaluated. The micro-scale cantilever specimens containing dissimilar interfaces were fabricated with a focused-ion-beam (FIB) technique, and they were loaded with a quantitative nanoindenter holder operated in a transmission electron microscope (TEM). The specimens were successfully fractured along the Si/Cu interface, and the critical loads at fracture were measured. The critical stress distribution near the free-edge was evaluated with the finite element method (FEM). The near-edge stress distributions of 90°/90°-shaped specimens were scattered while those of 135°/135°-shaped specimens were in good agreement despite the difference in specimen dimensions. Such a difference was discussed in terms of the relation between the magnitude of stress singularity and the microstructures of material.

Nanoscale Electrical Contacts Grown by Focused Ion Beam (FIB)-Induced Deposition

2013 ◽  
pp. 95-122 ◽  
Author(s):  
J. M. De Teresa ◽  
R. Córdoba ◽  
A. Fernández-Pacheco ◽  
S. Sangiao ◽  
M. R. Ibarra
Keyword(s):  
Focused Ion Beam ◽  
Ion Beam ◽  
Electrical Contacts

Optimization Based Geometric Modeling of Nano/Micro Scale Ion Milling of Organic Materials

2009 ◽  
Author(s):  
Jing Fu ◽  
Sanjay B. Joshi
Keyword(s):  
Geometric Modeling ◽  
Focused Ion Beam ◽  
Organic Materials ◽  
Ion Beam ◽  
Target Material ◽  
Milling Process ◽  
Ion Milling ◽  
Flexible Tool ◽  
Water Ice ◽  
Micro Scale

Recently, Focused Ion Beam (FIB) instruments have begun be applied to organic materials such as polymers and biological systems. This provides a novel tool for sectioning biological samples for analysis, or microfabrication with environment friendly materials. The modeling of nano/micro scale geometry accurately sculptured by FIB milling is crucial for generating the milling plan and process control, and for computer simulation for prediction and visualization of the milled geometry. However, modeling of the ion milling process on compound materials, especially for high aspect ratio feature, is still difficult due to the complexity of target material, as well as multiple physical and chemical interactions involved. In this study, a comprehensive model of ion milling with organic targets is presented to address the challenges using a simulation based approach. This platform has also been validated by milling different features on water ice in a cryogenic environment, and the simulation and experiment results show great consistency. With the proliferation of nanotechnology to biomedical and biomaterial domains, the proposed approach is expected to be a flexible tool for various applications involving novel and heterogeneous milling targets.

scholarly journals Optimization of Pt-C Deposits by Cryo-FIBID: Substantial Growth Rate Increase and Quasi-Metallic Behaviour

Nanomaterials ◽  
2020 ◽  
Vol 10 (10) ◽  
pp. 1906 ◽  
Author(s):  
Alba Salvador-Porroche ◽  
Soraya Sangiao ◽  
Patrick Philipp ◽  
Pilar Cea ◽  
José María De Teresa
Keyword(s):  
Growth Rate ◽  
Electrical Resistivity ◽  
Room Temperature ◽  
Focused Ion Beam ◽  
Ion Irradiation ◽  
Ion Beam ◽  
Electrical Contacts ◽  
Condensation Temperature ◽  
Monte Carlo Code ◽  
Condensed Layer

The Focused Ion Beam Induced Deposition (FIBID) under cryogenic conditions (Cryo-FIBID) technique is based on obtaining a condensed layer of precursor molecules by cooling the substrate below the condensation temperature of the gaseous precursor material. This condensed layer is irradiated with ions according to a desired pattern and, subsequently, the substrate is heated above the precursor condensation temperature, revealing the deposits with the shape of the exposed pattern. In this contribution, the fast growth of Pt-C deposits by Cryo-FIBID is demonstrated. Here, we optimize various parameters of the process in order to obtain deposits with the lowest-possible electrical resistivity. Optimized ~30 nm-thick Pt-C deposits are obtained using ion irradiation area dose of 120 μC/cm2 at 30 kV. This finding represents a substantial increment in the growth rate when it is compared with deposits of the same thickness fabricated by standard FIBID at room temperature (40 times enhancement). The value of the electrical resistivity in optimized deposits (~4 × 104 µΩ cm) is suitable to perform electrical contacts to certain materials. As a proof of concept of the potential applications of this technology, a 100 µm × 100 µm pattern is carried out in only 43 s of ion exposure (area dose of 23 μC/cm2), to be compared with 2.5 h if grown by standard FIBID at room temperature. The ion trajectories and the deposit composition have been simulated using a binary-collision-approximation Monte Carlo code, providing a solid basis for the understanding of the experimental results.

scholarly journals A lathe system for micrometre-sized cylindrical sample preparation at room and cryogenic temperatures

2020 ◽  
Vol 27 (2) ◽  
pp. 472-476
Author(s):  
Mirko Holler ◽  
Johannes Ihli ◽  
Esther H. R. Tsai ◽  
Fabio Nudelman ◽  
Mariana Verezhak ◽  
...  
Keyword(s):  
Sample Preparation ◽  
Room Temperature ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Cylindrical Sample ◽  
X Ray ◽  
X Ray Computed ◽  
Cryogenic Conditions ◽  
Cylindrical Samples ◽  
Potential Use

A simple two-spindle based lathe system for the preparation of cylindrical samples intended for X-ray tomography is presented. The setup can operate at room temperature as well as under cryogenic conditions, allowing the preparation of samples down to 20 and 50 µm in diameter, respectively, within minutes. Case studies are presented involving the preparation of a brittle biomineral brachiopod shell and cryogenically fixed soft brain tissue, and their examination by means of ptychographic X-ray computed tomography reveals the preparation method to be mainly free from causing artefacts. Since this lathe system easily yields near-cylindrical samples ideal for tomography, a usage for a wide variety of otherwise challenging specimens is anticipated, in addition to potential use as a time- and cost-saving tool prior to focused ion-beam milling. Fast sample preparation becomes especially important in relation to shorter measurement times expected in next-generation synchrotron sources.

scholarly journals Fabrication of a Lift-Out Grid with Electrical Contacts for Focused Ion Beam Preparation of Lamella for In Situ Transmission Electron Microscopy

2013 ◽  
Vol 19 (S2) ◽  
pp. 458-459 ◽  
Author(s):  
M. Mecklenburg ◽  
M. Brodie ◽  
W. Hubbard ◽  
E.R. White ◽  
A. Bushmaker ◽  
...  
Keyword(s):  
Electron Microscopy ◽  
Transmission Electron Microscopy ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Electrical Contacts ◽  
Transmission Electron

Extended abstract of a paper presented at Microscopy and Microanalysis 2013 in Indianapolis, Indiana, USA, August 4 – August 8, 2013.

Template synthesis and forming electrical contacts to single Au nanowires by focused ion beam techniques

2006 ◽  
Vol 17 (4) ◽  
pp. 1134-1139 ◽  
Author(s):  
S Valizadeh ◽  
M Abid ◽  
F Hernández-Ramírez ◽  
A Romano Rodríguez ◽  
K Hjort ◽  
...  
Keyword(s):  
Template Synthesis ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Electrical Contacts ◽  
Au Nanowires

Micro-Scale Strength Evaluation for Bonding Interface of Cold Sprayed Coatings

2016 ◽  
Vol 879 ◽  
pp. 795-800 ◽  
Author(s):  
Yuji Ichikawa ◽  
Ryotaro Tokoro ◽  
Kazuhiro Ogawa
Keyword(s):  
Mechanical Properties ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Strain Curve ◽  
Stress Strain Curve ◽  
Strength Evaluation ◽  
Scale Evaluation ◽  
Micro Scale ◽  
Macro Scale ◽  
Sprayed Coatings

A micro-scale interface strength evaluation technique is essential for evaluating cold-sprayed materials. A focused ion beam (FIB) micro strength test enables the micro-scale evaluation of the interface mechanical properties. However, this technique cannot be used to measure the strain in a specimen. This work discusses the possibility of strain measurement by combining this technique with image analysis in a newly designed test setup. Moreover, the micro stress-strain curve for cold-sprayed copper was obtained. This improved method enables us to measure stress with a precision of 5 MPa and strain with a precision of 0.015. It was determined that some local regions can deform plastically, which could not be determined with conventional micro-and macro-scale evaluation methods. These results proved that the coating is non-uniform, while also revealing various microstructure and mechanical properties.

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