Fused quartz granule (d50=0.019 mm) was used as raw material, nano-Y2O3 (size<0.08 μm) was used as additive with dosages of 1% (in mass, similarly hereinafter), 2% and 3%. Fused quartz ceramic materials were fabricated in reduction atmosphere at 1300 °C, 1350 °C and 1400 °C for 1 h. Properties of samples were researched by measurements of apparent porosity, bending strength and thermal expansion rate, and analyzed by XRD and SEM. The results showed that additive nano-Y2O3 had good inhibiting effect on crystallization of fused quartz sintered at various temperatures, sample added 2% nano-Y2O3 had least thermal expansion rate, diffraction peak intensity and apparent porosity, and it had higher bending strength and more compact microstructure, especially sample sintered at 1350 °C. It can be deduced that 2% nano-Y2O3 plays the excellent role as the crystallization inhibitor and sintering assistant to fused quartz materials sintered at various temperatures.