scholarly journals In situ total scattering experiments of nucleation and crystallisation of tantalum-based oxides: from highly dilute solutions via cluster formation to nanoparticles

Nanoscale ◽  
2021 ◽  
Vol 13 (1) ◽  
pp. 150-162
Author(s):  
Ezgi Onur Şahin ◽  
Harun Tüysüz ◽  
Candace K. Chan ◽  
Gun-hee Moon ◽  
Yitao Dai ◽  
...  

The formation mechanism of amorphous tantalum oxides was studied by total scattering experiments starting from alkoxide precursors. Hydrolysed TaxOyHz clusters form in highly dilute solutions which were transformed into L-Ta2O5 by calcination.

2019 ◽  
Vol 122 ◽  
pp. 179-188 ◽  
Author(s):  
A. Peys ◽  
C.E. White ◽  
H. Rahier ◽  
B. Blanpain ◽  
Y. Pontikes

1995 ◽  
Vol 397 ◽  
Author(s):  
M. Barth ◽  
J. Knobloch ◽  
P. Hess

ABSTRACTThe growth of high quality amorphous hydrogenated semiconductor films was explored with different in situ spectroscopic methods. Nucleation of ArF laser-induced CVD of a-Ge:H on different substrates was investigated by real time ellipsometry, whereas the F2 laser (157nm) deposition of a-Si:H was monitored by FTIR transmission spectroscopy. The ellipsometric studies reveal a significant influence of the substrate surface on the nucleation stage, which in fact determines the electronic and mechanical properties of the bulk material. Coalescence of initial clusters occurs at a thickness of 16 Å for atomically smooth hydrogen-terminated c-Si substrates, whereas on native oxide covered c-Si substrates the bulk volume void fractions are not reached until 35 Å film thickness. For the first time we present a series of IR transmission spectra with monolayer resolution of the initial growth of a-Si:H. Hereby the film thickness was measured simultaneously using a quartz crystal microbalance with corresponding sensitivity. The results give evidence for cluster formation with a coalescence radius of about 20 Å. Difference spectra calculated for layers at different depths with definite thickness reveal that the hydrogen-rich interface layer stays at the substrate surface and does not move with the surface of the growing film. The decrease of the Urbach energy switching from native oxide to H-terminated substrates suggests a strong influence of the interface morphology on the bulk material quality.


2012 ◽  
Vol 14 (9) ◽  
pp. 2983 ◽  
Author(s):  
Hiroyuki Asakura ◽  
Kentaro Teramura ◽  
Tetsuya Shishido ◽  
Tsunehiro Tanaka ◽  
Ning Yan ◽  
...  

2015 ◽  
Vol 65 ◽  
pp. 1083-1090 ◽  
Author(s):  
M. Samadi Khoshkhoo ◽  
S. Scudino ◽  
T. Gemming ◽  
J. Thomas ◽  
J. Freudenberger ◽  
...  

2018 ◽  
Vol 122 (23) ◽  
pp. 12267-12278 ◽  
Author(s):  
Heidemarie Embrechts ◽  
Martin Kriesten ◽  
Kilian Hoffmann ◽  
Wolfgang Peukert ◽  
Martin Hartmann ◽  
...  

2002 ◽  
Vol 323 (1-4) ◽  
pp. 269-271
Author(s):  
Ayumu Yasuda ◽  
Wataru Mizutani ◽  
Tetsuo Shimizu ◽  
Hiroshi Tokumoto

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