Stabilizing the ferroelectric phase in HfO2-based films sputtered from ceramic targets under ambient oxygen
Keyword(s):
The interplay of oxygen concentration and zirconium oxide concentration in thin HfxZr1−xO2 films significantly determines the phase and ferroelectric properties.
1963 ◽
Vol 204
(1)
◽
pp. 5-8
◽
2017 ◽
Vol 751
◽
pp. 384-389
◽
Keyword(s):