High-purity reflective color filters based on thin film cavities embedded with an ultrathin Ge2Sb2Te5 absorption layer
Keyword(s):
A thin film cavity formed by stacking metal–insulator–metal (MIM) continuous layers is of significant interest as a lithography-free and scalable color-filtering structure.
2006 ◽
Vol 27
(9)
◽
pp. 740-742
◽
Keyword(s):
2016 ◽
Vol 27
(12)
◽
pp. 12527-12532
◽
Keyword(s):
Keyword(s):
Etch Properties of TiN Thin Film in Metal–Insulator–Metal Capacitor Using Inductively Coupled Plasma
2011 ◽
Vol 50
(8)
◽
pp. 08KC01
◽
Keyword(s):
Keyword(s):