scholarly journals Boosting the performance of NO2 gas sensors based on n–n type mesoporous ZnO@In2O3 heterojunction nanowires: in situ conducting probe atomic force microscopic elucidation of room temperature local electron transport

2020 ◽  
Vol 2 (10) ◽  
pp. 4785-4797
Author(s):  
Ramakrishnan Vishnuraj ◽  
Karthikeyan K. Karuppanan ◽  
Mahaboobbatcha Aleem ◽  
Biji Pullithadathil
Keyword(s):  
Atomic Force Microscopy ◽  
Electron Transport ◽  
Gas Sensors ◽  
Room Temperature ◽  
Local Electron ◽  
Force Microscopy ◽  
Atomic Force ◽  
Electron Transport Properties ◽  
Mesoporous Zno

This study emphasis on the effect of n–n heterojunctions in ZnO@In2O3 nanowires on boosting NO2 sensing properties and elucidate the local electron transport properties during sensing process at room-temperature by in situ Conducting Probe Atomic Force Microscopy.

scholarly journals NO gas sensing at room temperature using single titanium oxide nanodot sensors created by atomic force microscopy nanolithography

2016 ◽  
Vol 7 ◽  
pp. 1044-1051 ◽  
Author(s):  
Li-Yang Hong ◽  
Heh-Nan Lin
Keyword(s):  
Atomic Force Microscopy ◽  
Metal Oxide ◽  
Titanium Oxide ◽  
Gas Sensors ◽  
Room Temperature ◽  
Gas Sensing ◽  
Force Microscopy ◽  
Atomic Force ◽  
Single Metal Oxide ◽  
Contact Electrodes

In this work, the fabrication of single titanium oxide nanodot (ND) resistive sensors for NO gas sensing at room temperature is reported. Two atomic force microscopy nanolithography methods, nanomachining and nano-oxidation, are employed. A single titanium nanowire (NW) is created first along with contact electrodes and a single titanium oxide ND is subsequently produced in the NW. Gas sensing is realized by the photo-activation and the photo-recovery approaches. It is found that a sensor with a smaller ND has better performance than a larger one. A response of 31%, a response time of 91 s, and a recovery time of 184 s have been achieved at a concentration of 10 ppm for a ND with a size of around 80 nm. The present work demonstrates the potential application of single metal oxide NDs for gas sensing with a performance that is comparable with that of metal oxide nanowire gas sensors.

On the Evolution of Surface Morphology of Polysilicon Mems Structures During Fatigue

2000 ◽  
Vol 657 ◽  
Author(s):  
S. M. Allameh ◽  
B. Gally ◽  
S. Brown ◽  
W.O. Soboyejo
Keyword(s):  
Atomic Force Microscopy ◽  
Room Temperature ◽  
Surface Topology ◽  
Ex Situ ◽  
Surface Processes ◽  
Chemical Surface ◽  
Force Microscopy ◽  
Atomic Force ◽  
Large Wavelength

ABSTRACTThis paper presents the results of an atomic force microscopy (AFM) study of the evolution of surface topology in notched polysilicon MEMS structures deformed under cyclic loading at room temperature. The in-situ and ex-situ AFM studies reveal changes in surface topology after cyclic actuation at a relative humidity of ∼70%. These lead ultimately to large wavelength modulations close to the bottom of the notch, in the areas where the tensile stresses are maximum. This is in contrast with the wavelength of the surface modulations away from the notch, which remain relatively unchanged. The results are discussed in terms of possible chemical/surface processes that can occur in the presence of water vapor.

Atomic force microscopy of in situ deformed nickel thin films

1999 ◽  
Vol 353 (1-2) ◽  
pp. 194-200 ◽  
Author(s):  
C. Coupeau ◽  
J.F. Naud ◽  
F. Cleymand ◽  
P. Goudeau ◽  
J. Grilhé
Keyword(s):  
Thin Films ◽  
Atomic Force Microscopy ◽  
Force Microscopy ◽  
Nickel Thin Films ◽  
Atomic Force
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