CO2-based atomic/molecular layer deposition of lithium ethylene carbonate thin films
Keyword(s):
CO2 is used as a precursor in atomic/molecular layer deposition (ALD/MLD) for the fabrication of lithium ethylene carbonates, which are the organic species that naturally form in the solid electrolyte interphase of a typical lithium-ion battery.
2013 ◽
Vol 160
(11)
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pp. A1971-A1978
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2016 ◽
Vol 3
(21)
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pp. 1600762
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2017 ◽
Vol 370
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pp. 131-137
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2018 ◽
Vol 7
(3)
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pp. 89-96
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