In situ TEM observation of void formation and migration in phase change memory devices with confined nanoscale Ge2Sb2Te5
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Void formation and migration that drive the device failure of Ge2Sb2Te5 (GST)-based practical devices were revealed via in situ TEM.
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2014 ◽
Vol 85
(9)
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pp. 094904
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2019 ◽
Vol 1237
◽
pp. 042064
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