Formation of various-axes-oriented wurtzite nuclei and enlargement of the a-axis-oriented region in AlFeN films deposited on Si(100) substrates
Wurtzite AlN films with high Fe concentrations were deposited on Si(100) substrates using radio-frequency sputtering, and the growth process was investigated. X-ray diffraction (XRD) analyses with parallel incident X-rays showed...
2020 ◽
Vol 20
(12)
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pp. 7530-7534
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