Quantifying low fluence ion implants in diamond-like carbon film by secondary ion mass spectrometry by understanding matrix effects
Keyword(s):
Secondary ion mass spectrometry (SIMS) data from diamond like carbon (DLC) often give inaccurate, imprecise results when methods tailored for silicon are applied. This work is a guide to accurate and precise results from future SIMS analyses of DLC.
2018 ◽
Vol 32
(22)
◽
pp. 1962-1970
◽
Keyword(s):
2007 ◽
Vol 16
(4-7)
◽
pp. 1312-1315
◽
1987 ◽
Vol 2
(8)
◽
pp. 773
◽
1984 ◽
Vol 61
(1)
◽
pp. 59-70
◽
2015 ◽
Vol 40
(2)
◽
pp. 157-172
◽
1995 ◽
Vol 151
(1)
◽
pp. 63-68
◽
Keyword(s):