Vapour–liquid–solid-like growth of high-quality and uniform 3C–SiC heteroepitaxial films on α-Al2O3(0001) substrates
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We employ our pulsed laser deposition system with rapid beam deflection to demonstrate the heteroepitaxial growth of 3C–SiC thin films by a vapour–liquid–solid-like mechanism by alternating deposition of SiC and NiSi2 flux in nanoscale.
1998 ◽
Vol 16
(4)
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pp. 2725-2727
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2019 ◽
Vol 32
(5)
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pp. 054002
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2001 ◽
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2008 ◽
Vol 368-372
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pp. 308-311
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2010 ◽
Vol 25
(10)
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pp. 1886-1889
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