Hierarchical patterns with sub-20 nm pattern fidelity via block copolymer self-assembly and soft nanotransfer printing
We describe the development of a technique to transfer micrometer patterns of organic thin films with sub-50 nm edge resolution and sub-20 nm pattern fidelity.
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2019 ◽
Vol 6
(11)
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pp. 1970067
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2001 ◽
pp. 34-49
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2015 ◽
Vol 7
(5)
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pp. 3323-3328
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2013 ◽
Vol 26
(1)
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pp. 55-58
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