Hierarchical multi-level block copolymer patterns by multiple self-assembly
Keyword(s):
Unusual pattern generation of various 2D and 3D nanostructures can be achieved by the multiple self-assembly of block copolymers (BCPs) such as big-dot, double-dot, line-on-dot, pondering, dot-in-honeycomb, dot-in-pondering, and line-on-pondering patterns.