Accurate determination of the layer thickness of a multilayer polymer film by non-invasive multivariate confocal Raman microscopy
Keyword(s):
We present a confocal Raman depth profiling technique combined with multivariate spectral decomposition. The method allows for non-invasive layer structure and chemical composition determination on polymer multilayer films with micrometer accuracy.
2005 ◽
Vol 744-747
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pp. 997-1003
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2013 ◽
Vol 28
(10)
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pp. 105011
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2018 ◽
Vol 91
(1)
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pp. 1049-1055
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2016 ◽
Vol 104
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pp. 51-58
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