Analytical performance of μ-groove silicon attenuated total reflection waveguides
Keyword(s):
The analytical performance of micromachined μ-groove silicon attenuated total reflection (ATR) elements has been evaluated in a comparison of Fourier-transform infrared (FTIR) and quantum cascade laser (QCL) spectroscopy operating at mid-infrared (MIR) wavelengths.
2018 ◽
Vol 90
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pp. 7072-7079
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2012 ◽
Vol 26
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pp. 207-210
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2020 ◽
1990 ◽
Vol 193
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pp. 409-420
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2006 ◽
Vol 576
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pp. 130-135
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