Soft thermal nanoimprint with a 10 nm feature size

Soft Matter ◽  
2019 ◽  
Vol 15 (13) ◽  
pp. 2897-2904 ◽  
Author(s):  
Ashish Pandey ◽  
Sivan Tzadka ◽  
Dor Yehuda ◽  
Mark Schvartzman
Keyword(s):  
High Resolution ◽  
Polymer Films ◽  
Chalcogenide Glasses ◽  
Feature Size

We explore the miniaturization edge of soft nanoimprint molds, and demonstrate their feasibility to ultra-high resolution patterning of polymer films on planar and curved substrates, as well as of chalcogenide glasses.

High Resolution Backside Thermography Using a Numerical Aperture Increasing Lens

2003 ◽  
Author(s):  
S. Thorne ◽  
S. Ippolito ◽  
M. Eraslan ◽  
B. Goldberg ◽  
M.S. Ünlü ◽  
...  
Keyword(s):  
High Resolution ◽  
Integrated Circuits ◽  
Failure Analysis ◽  
Visual Inspection ◽  
Thermal Emission ◽  
Numerical Aperture ◽  
Specific Component ◽  
Feature Size ◽  
Analytical Technique ◽  
Emission Microscopy

Abstract As the feature size in integrated circuits (ICs) become smaller, the techniques we use to localize defects must also progress to the level that they can resolve potential errors. Additionally, because most errors cannot be identified by visual inspection alone, it is necessary to develop techniques, such as thermography, with the capability of localizing failures to the specific component or defect at fault. This paper will review the theory and application of an advanced subsurface (through the substrate) analytical technique for IC failure analysis – solid immersion lens thermal emission microscopy.

Electrochemical polymerization: an emerging approach for fabricating high-quality luminescent films and super-resolution OLEDs

2020 ◽  
Vol 8 (16) ◽  
pp. 5310-5320 ◽  
Author(s):  
Manlin Zhao ◽  
Huanhuan Zhang ◽  
Cheng Gu ◽  
Yuguang Ma
Keyword(s):  
High Resolution ◽  
Conducting Polymer ◽  
Polymer Films ◽  
Electrochemical Polymerization ◽  
Super Resolution ◽  
High Quality ◽  
Luminescent Films ◽  
Conducting Polymer Films

Currently, the fabrication of high-resolution OLEDs has many limitations. Electrochemical polymerization is an efficient way to fabricate conducting polymer films.

Sampling and Reference Considerations for Very High Resolution AFM Analysis

2004 ◽  
Author(s):  
Carolyn F. H. Gondran ◽  
Diane K. Michelson
Keyword(s):  
High Resolution ◽  
Electronic Device ◽  
Sampling Plan ◽  
Feature Size ◽  
Size Information ◽  
Reference Set ◽  
Device Structures ◽  
Afm Analysis ◽  
Very High

Abstract The geometries of several proposed new electronic device structures put constraints on the size of the AFM images that can be obtained in the gate areas. The images that can be obtained on these structures are of a significantly smaller area, at a much higher resolution, than is typically measured. The analysis areas are limited to ~ one-tenth of what is normally scanned. The micro-roughness and feature size information contained in AFM measurements changes with scan size. Care must be taken when introducing such a dramatic change in the measurements being made. Several factors should be considered to determine an appropriate sampling plan and select a proper reference set for these high-resolution measurements. In this paper, several of these factors are discussed in the context of determining a sampling plan and reference targets for sidewall micro-roughness of fins that allow 50 nm analysis areas.

High resolution electrical characterisation of Ag-conducting heterogeneous chalcogenide glasses

2010 ◽  
Vol 181 (25-26) ◽  
pp. 1205-1208 ◽  
Author(s):  
A.A. Piarristeguy ◽  
M. Ramonda ◽  
N. Frolet ◽  
M. Ribes ◽  
A. Pradel
Keyword(s):  
High Resolution ◽  
Chalcogenide Glasses

Observations of the spatial structure of interstellar hydrogen

1967 ◽  
Vol 31 ◽  
pp. 45-46
Author(s):  
Carl Heiles
Keyword(s):  
High Resolution ◽  
Spatial Structure ◽  
Velocity Dispersion ◽  
Temperature Variations

High-resolution 21-cm line observations in a region aroundlII= 120°,b11= +15°, have revealed four types of structure in the interstellar hydrogen: a smooth background, large sheets of density 2 atoms cm-3, clouds occurring mostly in groups, and ‘Cloudlets’ of a few solar masses and a few parsecs in size; the velocity dispersion in the Cloudlets is only 1 km/sec. Strong temperature variations in the gas are in evidence.

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