Flexible hemispheric microarrays of highly pressure-sensitive sensors based on breath figure method

Nanoscale ◽  
2018 ◽  
Vol 10 (22) ◽  
pp. 10691-10698 ◽  
Author(s):  
Zhihui Wang ◽  
Ling Zhang ◽  
Jin Liu ◽  
Hao Jiang ◽  
Chunzhong Li
Keyword(s):  
Pressure Sensor ◽  
Pressure Sensors ◽  
Pressure Sensing ◽  
Sensing Range ◽  
Pressure Sensitive ◽  
Breath Figure ◽  
Breath Figure Method ◽  
Flexible Pressure Sensors

Flexible pressure sensors with interlocked hemispheric microstructures are prepared by a novel breath figure strategy. The subtle microstructure remarkably improves the sensitivity and pressure sensing range of the pressure sensor.

Multi length scale hierarchical architecture overcoming pressure sensing range-speed tradeoff for flexible pressure sensors

2021 ◽  
Author(s):  
Qiong Tian ◽  
Wenrong Yan ◽  
Tianding CHEN ◽  
Derek Ho
Keyword(s):  
Biomedical Applications ◽  
Pressure Sensors ◽  
Human Machine Interface ◽  
Hierarchical Architecture ◽  
Soft Robotics ◽  
Length Scale ◽  
Pressure Sensing ◽  
Sensing Range ◽  
Machine Interface ◽  
Flexible Pressure Sensors

Pressure sensing electronics have gained great attention in human-machine interface, soft robotics, and wearable biomedical applications. However, existing sensor architectures are inadequate in overcoming the classic tradeoff between sensing range,...

scholarly journals Highly Sensitive Pseudocapacitive Iontronic Pressure Sensor with Broad Sensing Range

2021 ◽  
Vol 13 (1) ◽  
Author(s):  
Libo Gao ◽  
Meng Wang ◽  
Weidong Wang ◽  
Hongcheng Xu ◽  
Yuejiao Wang ◽  
...  
Keyword(s):  
Pressure Sensor ◽  
Limit Of Detection ◽  
Pressure Sensors ◽  
List Type ◽  
Practical Application ◽  
Flexible Robot ◽  
Sensing Range ◽  
Physical Activity Monitoring ◽  
Ultrahigh Sensitivity ◽  
Flexible Pressure Sensors

Highlights The iontronic pressure sensor achieved an ultrahigh sensitivity (Smin > 200 kPa−1, Smax > 45,000 kPa−1). The iontronic pressure sensor exhibited a broad sensing range of over 1.4 MPa. Pseudocapacitive iontronic pressure sensor using MXene was proposed. ABSTRACT Flexible pressure sensors are unprecedentedly studied on monitoring human physical activities and robotics. Simultaneously, improving the response sensitivity and sensing range of flexible pressure sensors is a great challenge, which hinders the devices’ practical application. Targeting this obstacle, we developed a Ti3C2Tx-derived iontronic pressure sensor (TIPS) by taking the advantages of the high intercalation pseudocapacitance under high pressure and rationally designed structural configuration. TIPS achieved an ultrahigh sensitivity (Smin > 200 kPa−1, Smax > 45,000 kPa−1) in a broad sensing range of over 1.4 MPa and low limit of detection of 20 Pa as well as stable long-term working durability for 10,000 cycles. The practical application of TIPS in physical activity monitoring and flexible robot manifested its versatile potential. This study provides a demonstration for exploring pseudocapacitive materials for building flexible iontronic sensors with ultrahigh sensitivity and sensing range to advance the development of high-performance wearable electronics.

CMOS-MEMS Based Current Mirror MOSFET Embedded Pressure Sensor for Healthcare and Biomedical Applications

2013 ◽  
Vol 647 ◽  
pp. 315-320 ◽  
Author(s):  
Pradeep Kumar Rathore ◽  
Brishbhan Singh Panwar
Keyword(s):  
Pressure Sensor ◽  
Biomedical Applications ◽  
Circuit Simulation ◽  
Applied Pressure ◽  
Pressure Sensors ◽  
Cmos Technology ◽  
Current Mirror ◽  
Sensing Element ◽  
Pressure Sensing ◽  
Cmos Mems

This paper reports on the design and optimization of current mirror MOSFET embedded pressure sensor. A current mirror circuit with an output current of 1 mA integrated with a pressure sensing n-channel MOSFET has been designed using standard 5 µm CMOS technology. The channel region of the pressure sensing MOSFET forms the flexible diaphragm as well as the strain sensing element. The piezoresistive effect in MOSFET has been exploited for the calculation of strain induced carrier mobility variation. The output transistor of the current mirror forms the active pressure sensing MOSFET which produces a change in its drain current as a result of altered channel mobility under externally applied pressure. COMSOL Multiphysics is utilized for the simulation of pressure sensing structure and Tspice is employed to evaluate the characteristics of the current mirror pressure sensing circuit. Simulation results show that the pressure sensor has a sensitivity of 10.01 mV/MPa. The sensing structure has been optimized through simulation for enhancing the sensor sensitivity to 276.65 mV/MPa. These CMOS-MEMS based pressure sensors integrated with signal processing circuitry on the same chip can be used for healthcare and biomedical applications.

Flexible pressure sensing film based on ultra-sensitive SWCNT/PDMS spheres for monitoring human pulse signals

2015 ◽  
Vol 3 (27) ◽  
pp. 5436-5441 ◽  
Author(s):  
Yan-Long Tai ◽  
Zhen-Guo Yang
Keyword(s):  
Pressure Sensors ◽  
Pressure Sensing ◽  
Prosthetic Limbs ◽  
Electronic Skin ◽  
Essential Components ◽  
Biomedical Diagnostics ◽  
Healthcare Monitoring ◽  
Flexible Pressure Sensors ◽  
Human Healthcare

Flexible pressure sensors are essential components of an electronic skin for future attractive applications ranging from human healthcare monitoring to biomedical diagnostics to robotic skins to prosthetic limbs.

scholarly journals A Highly Sensitive and Flexible Capacitive Pressure Sensor Based on a Porous Three-Dimensional PDMS/Microsphere Composite

Polymers ◽  
2020 ◽  
Vol 12 (6) ◽  
pp. 1412 ◽  
Author(s):  
Young Jung ◽  
Wookjin Lee ◽  
Kyungkuk Jung ◽  
Byunggeon Park ◽  
Jinhyoung Park ◽  
...  
Keyword(s):  
Pressure Sensor ◽  
Sacrificial Layer ◽  
Three Dimensional ◽  
Pressure Sensors ◽  
Capacitive Pressure Sensor ◽  
Mechanical Stimuli ◽  
Highly Sensitive ◽  
Flexible Pressure Sensors ◽  
Fast Rise ◽  
Better Than

In recent times, polymer-based flexible pressure sensors have been attracting a lot of attention because of their various applications. A highly sensitive and flexible sensor is suggested, capable of being attached to the human body, based on a three-dimensional dielectric elastomeric structure of polydimethylsiloxane (PDMS) and microsphere composite. This sensor has maximal porosity due to macropores created by sacrificial layer grains and micropores generated by microspheres pre-mixed with PDMS, allowing it to operate at a wider pressure range (~150 kPa) while maintaining a sensitivity (of 0.124 kPa−1 in a range of 0~15 kPa) better than in previous studies. The maximized pores can cause deformation in the structure, allowing for the detection of small changes in pressure. In addition to exhibiting a fast rise time (~167 ms) and fall time (~117 ms), as well as excellent reproducibility, the fabricated pressure sensor exhibits reliability in its response to repeated mechanical stimuli (2.5 kPa, 1000 cycles). As an application, we develop a wearable device for monitoring repeated tiny motions, such as the pulse on the human neck and swallowing at the Adam’s apple. This sensory device is also used to detect movements in the index finger and to monitor an insole system in real-time.

scholarly journals Single-Layer Pressure Textile Sensors with Woven Conductive Yarn Circuit

2020 ◽  
Vol 10 (8) ◽  
pp. 2877 ◽  
Author(s):  
Gaeul Kim ◽  
Chi Cuong Vu ◽  
Jooyong Kim
Keyword(s):  
Pressure Sensor ◽  
Pressure Sensors ◽  
Single Layer ◽  
Fast Response ◽  
Resistance Change ◽  
Load Pressure ◽  
Pressure Sensitive ◽  
High Durability ◽  
Textile Sensors ◽  
Conductive Fibers

Today, e-textiles have become a fundamental trend in wearable devices. Fabric pressure sensors, as a part of e-textiles, have also received much interest from many researchers all over the world. However, most of the pressure sensors are made of electronic fibers and composed of many layers, including an intermediate layer for sensing the pressure. This paper proposes the model of a single layer pressure sensor with electrodes and conductive fibers intertwined. The plan dimensions of the fabricated sensors are 14 x 14 mm, and the thickness is 0.4 mm. The whole area of the sensor is the pressure-sensitive point. As expected, results demonstrate an electrical resistance change from 283 Ω at the unload pressure to 158 Ω at the load pressure. Besides, sensors have a fast response time (50 ms) and small hysteresis (5.5%). The hysteresis will increase according to the pressure and loading distance, but the change of sensor loading distance is very small. Moreover, the single-layer pressure sensors also show high durability under many working cycles (20,000 cycles) or washing times (50 times). The single-layer pressure sensor is very thin and more flexible than the multi-layer pressure sensor. The structure of this sensor is also expected to bring great benefits to wearable technology in the future.

scholarly journals Locally Controlled Sensing Properties of Stretchable Pressure Sensors Enabled by Micro-Patterned Piezoresistive Device Architecture

Sensors ◽  
2020 ◽  
Vol 20 (22) ◽  
pp. 6588
Author(s):  
Jun Ho Lee ◽  
Jae Sang Heo ◽  
Keon Woo Lee ◽  
Jae Cheol Shin ◽  
Jeong-Wan Jo ◽  
...  
Keyword(s):  
Pressure Sensor ◽  
Silver Nanowires ◽  
Pressure Sensors ◽  
High Sensitivity ◽  
Fast Response ◽  
Large Area ◽  
Site Specific ◽  
Sensing Properties ◽  
Sensing Range ◽  
Wide Range

For wearable health monitoring systems and soft robotics, stretchable/flexible pressure sensors have continuously drawn attention owing to a wide range of potential applications such as the detection of human physiological and activity signals, and electronic skin (e-skin). Here, we demonstrated a highly stretchable pressure sensor using silver nanowires (AgNWs) and photo-patternable polyurethane acrylate (PUA). In particular, the characteristics of the pressure sensors could be moderately controlled through a micro-patterned hole structure in the PUA spacer and size-designs of the patterned hole area. With the structural-tuning strategies, adequate control of the site-specific sensitivity in the range of 47~83 kPa−1 and in the sensing range from 0.1 to 20 kPa was achieved. Moreover, stacked AgNW/PUA/AgNW (APA) structural designed pressure sensors with mixed hole sizes of 10/200 µm and spacer thickness of 800 µm exhibited high sensitivity (~171.5 kPa−1) in the pressure sensing range of 0~20 kPa, fast response (100~110 ms), and high stretchability (40%). From the results, we envision that the effective structural-tuning strategy capable of controlling the sensing properties of the APA pressure sensor would be employed in a large-area stretchable pressure sensor system, which needs site-specific sensing properties, providing monolithic implementation by simply arranging appropriate micro-patterned hole architectures.

A pressure-deformation analytical model for rectangular diaphragm of MEMS pressure sensors

2017 ◽  
Vol 31 (05) ◽  
pp. 1750046
Author(s):  
Wu Zhou ◽  
Dong Wang ◽  
Huijun Yu ◽  
Bei Peng
Keyword(s):  
Pressure Sensor ◽  
Applied Pressure ◽  
Influence Factors ◽  
Pressure Sensors ◽  
Superposition Method ◽  
Uniform Load ◽  
Pressure Sensitive ◽  
Partial Load ◽  
Mems Pressure Sensors ◽  
Measured Pressure

Rectangular diaphragm is commonly used as a pressure sensitive component in MEMS pressure sensors. Its deformation under applied pressure directly determines the performance of micro-devices, accurately acquiring the pressure–deflection relationship, therefore, plays a significant role in pressure sensor design. This paper analyzes the deflection of an isotropic rectangular diaphragm under combined effects of loads. The model is regarded as a clamped plate with full surface uniform load and partially uniform load applied on its opposite sides. The full surface uniform load stands for the external measured pressure. The partial load is used to approximate the opposite reaction of the silicon island which is planted on the diaphragm to amplify the deformation displacement, thus to improve the sensitivity of the pressure sensor. Superposition method is proposed to calculate the diaphragm deflections. This method considers separately the actions of loads applied on the simple supported plate and moments distributed on edges. Considering the boundary condition of all edges clamped, the moments are constructed to eliminate the boundary rotations caused by lateral load. The diaphragm’s deflection is computed by superposing deflections which produced by loads applied on the simple supported plate and moments distributed on edges. This method provides higher calculation accuracy than Galerkin variational method, and it is used to analyze the influence factors of the diaphragm’s deflection, includes aspect ratio, thickness and the applied force area of the diaphragm.

scholarly journals High-Sensitivity Flexible Pressure Sensor-Based 3D CNTs Sponge for Human–Computer Interaction

Polymers ◽  
2021 ◽  
Vol 13 (20) ◽  
pp. 3465
Author(s):  
Jianli Cui ◽  
Xueli Nan ◽  
Guirong Shao ◽  
Huixia Sun
Keyword(s):  
Pressure Sensor ◽  
High Performance ◽  
Large Scale ◽  
Low Cost ◽  
Pressure Sensors ◽  
Chemical Vapor ◽  
High Sensitivity ◽  
Wearable Electronics ◽  
Wide Range ◽  
Flexible Pressure Sensors

Researchers are showing an increasing interest in high-performance flexible pressure sensors owing to their potential uses in wearable electronics, bionic skin, and human–machine interactions, etc. However, the vast majority of these flexible pressure sensors require extensive nano-architectural design, which both complicates their manufacturing and is time-consuming. Thus, a low-cost technology which can be applied on a large scale is highly desirable for the manufacture of flexible pressure-sensitive materials that have a high sensitivity over a wide range of pressures. This work is based on the use of a three-dimensional elastic porous carbon nanotubes (CNTs) sponge as the conductive layer to fabricate a novel flexible piezoresistive sensor. The synthesis of a CNTs sponge was achieved by chemical vapor deposition, the basic underlying principle governing the sensing behavior of the CNTs sponge-based pressure sensor and was illustrated by employing in situ scanning electron microscopy. The CNTs sponge-based sensor has a quick response time of ~105 ms, a high sensitivity extending across a broad pressure range (less than 10 kPa for 809 kPa−1) and possesses an outstanding permanence over 4,000 cycles. Furthermore, a 16-pixel wireless sensor system was designed and a series of applications have been demonstrated. Its potential applications in the visualizing pressure distribution and an example of human–machine communication were also demonstrated.

A multiscale flexible pressure sensor based on nanovesicle-like hollow microspheres for micro-vibration detection in non-contact mode

Nanoscale ◽  
2019 ◽  
Vol 11 (12) ◽  
pp. 5737-5745 ◽  
Author(s):  
Tie Li ◽  
Lili Li ◽  
Yuanyuan Bai ◽  
Yudong Cao ◽  
Qifeng Lu ◽  
...  
Keyword(s):  
Pressure Sensor ◽  
Pressure Sensors ◽  
Hollow Microspheres ◽  
Contact Mode ◽  
Vibration Signals ◽  
Vibration Detection ◽  
Flexible Pressure Sensor ◽  
Micro Vibration ◽  
Flexible Pressure Sensors

Hierarchical nanovesicle-like hollow microspheres are employed to fabricate flexible pressure sensors for detecting micro-vibration signals in non-contacting mode.

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