An overview of molecular layer deposition for organic and organic–inorganic hybrid materials: mechanisms, growth characteristics, and promising applications

2017 ◽  
Vol 5 (35) ◽  
pp. 18326-18378 ◽  
Author(s):  
Xiangbo Meng

This review makes a comprehensive summary on the processes of molecular layer deposition (MLD) for organic and organic–inorganic hybrid materials, and on their applications.

Author(s):  
Seung-Hwan Lee ◽  
Hyun-Jun Jeong ◽  
Ki-Lim Han ◽  
GeonHo Beak ◽  
Jin-Seong Park

Indium oxide and indicone hybrid films consisting of indium oxide and organic aromatic linker are grown by molecular layer deposition (MLD) using bis(trimethylsilyl)amido-diethyl Indium (INCA-1) as the indium precursor, hydrogen...


2022 ◽  
Author(s):  
GeonHo Beak ◽  
Seung-Hwan Lee ◽  
Hye-mi Kim ◽  
Su-Hwan Choi ◽  
Jin-Seong Park

Organic/inorganic hybrid tincone films were deposited by molecular layer deposition (MLD) using N,N′-tert-butyl-1,1-dimethylethylenediamine stannylene(II) as a precursor and hydroquinone (HQ) as organic reactants. As a result of previous studies it...


2015 ◽  
Vol 44 (33) ◽  
pp. 14782-14792 ◽  
Author(s):  
Yan-Qiang Cao ◽  
Lin Zhu ◽  
Xin Li ◽  
Zheng-Yi Cao ◽  
Di Wu ◽  
...  

Ti-based fumaric acid hybrid thin films were successfully prepared using inorganic TiCl4 and organic fumaric acid as precursors by molecular layer deposition (MLD).


2019 ◽  
Vol 10 ◽  
pp. 399-411 ◽  
Author(s):  
Leva Momtazi ◽  
Henrik H Sønsteby ◽  
Ola Nilsen

We have constructed thin films of organic–inorganic hybrid character by combining titanium tetra-isopropoxide (TTIP) and the nucleobases thymine, uracil or adenine using the molecular layer deposition (MLD) approach. Such materials have potential as bioactive coatings, and the bioactivity of these films is described in our recent work [Momtazi, L.; Dartt, D. A.; Nilsen, O.; Eidet, J. R. J. Biomed. Mater. Res., Part A 2018, 106, 3090–3098. doi:10.1002/jbm.a.36499]. The growth was followed by in situ quartz crystal microbalance (QCM) measurements and all systems exhibited atomic layer deposition (ALD) type of growth. The adenine system has an ALD temperature window between 250 and 300 °C, while an overall reduction in growth rate with increasing temperature was observed for the uracil and thymine systems. The bonding modes of the films have been further characterized by Fourier transform infrared spectroscopy, X-ray photoelectron spectroscopy and X-ray diffraction, confirming the hybrid nature of the as-deposited films with an amorphous structure where partial inclusion of the TTIP molecule occurs during growth. The films are highly hydrophilic, while the nucleobases do leach in water providing an amorphous structure mainly of TiO2 with reduced density and index of refraction.


2020 ◽  
Vol 8 (42) ◽  
pp. 22100-22110
Author(s):  
Huibing He ◽  
Jian Liu

A novel organic–inorganic hybrid coating (alucone) by molecular layer deposition was developed to construct stable, dendrite-free, and deeply rechargeable Zn anodes for aqueous zinc-ion batteries.


2014 ◽  
Vol 5 ◽  
pp. 1104-1136 ◽  
Author(s):  
Pia Sundberg ◽  
Maarit Karppinen

The possibility to deposit purely organic and hybrid inorganic–organic materials in a way parallel to the state-of-the-art gas-phase deposition method of inorganic thin films, i.e., atomic layer deposition (ALD), is currently experiencing a strongly growing interest. Like ALD in case of the inorganics, the emerging molecular layer deposition (MLD) technique for organic constituents can be employed to fabricate high-quality thin films and coatings with thickness and composition control on the molecular scale, even on complex three-dimensional structures. Moreover, by combining the two techniques, ALD and MLD, fundamentally new types of inorganic–organic hybrid materials can be produced. In this review article, we first describe the basic concepts regarding the MLD and ALD/MLD processes, followed by a comprehensive review of the various precursors and precursor pairs so far employed in these processes. Finally, we discuss the first proof-of-concept experiments in which the newly developed MLD and ALD/MLD processes are exploited to fabricate novel multilayer and nanostructure architectures by combining different inorganic, organic and hybrid material layers into on-demand designed mixtures, superlattices and nanolaminates, and employing new innovative nanotemplates or post-deposition treatments to, e.g., selectively decompose parts of the structure. Such layer-engineered and/or nanostructured hybrid materials with exciting combinations of functional properties hold great promise for high-end technological applications.


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