Rapid fabrication of solid-state nanopores with high reproducibility over a large area using a helium ion microscope
Keyword(s):
The practical issues (reproducibility, time and pore size control) for massive fabrication of nanopores over a wafer size of several inches for biomolecule detection are addressed here.
2016 ◽
Vol 494
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pp. 180-185
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2018 ◽
Vol 16
(8)
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pp. 4631-4636
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2012 ◽
pp. 51-60
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2007 ◽
Vol 40
(13)
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pp. 1235-1241
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2000 ◽
Vol 108
(1254)
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pp. 172-177
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