Understanding the formation of the metastable ferroelectric phase in hafnia–zirconia solid solution thin films

Nanoscale ◽  
2018 ◽  
Vol 10 (2) ◽  
pp. 716-725 ◽  
Author(s):  
Min Hyuk Park ◽  
Young Hwan Lee ◽  
Han Joon Kim ◽  
Yu Jin Kim ◽  
Taehwan Moon ◽  
...  
Keyword(s):  
Thin Films ◽  
Solid Solution ◽  
Ferroelectric Phase ◽  
Orthorhombic Phase ◽  
Thermodynamics And Kinetics

The origin of the formation of the unexpected ferroelectric orthorhombic phase is systematically examined based on both thermodynamics and kinetics.

Formation of the orthorhombic phase in CeO2-HfO2 solid solution epitaxial thin films and their ferroelectric properties

2019 ◽  
Vol 114 (23) ◽  
pp. 232902 ◽  
Author(s):  
T. Shiraishi ◽  
S. Choi ◽  
T. Kiguchi ◽  
T. Shimizu ◽  
H. Funakubo ◽  
...  
Keyword(s):  
Thin Films ◽  
Solid Solution ◽  
Ferroelectric Properties ◽  
Orthorhombic Phase ◽  
Epitaxial Thin Films

The Precipitation of Si in AlCuSi Thin Films

1973 ◽  
Vol 31 ◽  
pp. 34-35 ◽  
Author(s):  
R. M. Anderson
Keyword(s):  
Electron Microscopy ◽  
Thin Films ◽  
Heat Treatment ◽  
Solid Solution ◽  
Integrated Circuit ◽  
Copper Film ◽  
Solution Concentration ◽  
X Ray ◽  
Silicon Thin Films ◽  
Before And After

Aluminum-copper-silicon thin films have been considered as an interconnection metallurgy for integrated circuit applications. Various schemes have been proposed to incorporate small percent-ages of silicon into films that typically contain two to five percent copper. We undertook a study of the total effect of silicon on the aluminum copper film as revealed by transmission electron microscopy, scanning electron microscopy, x-ray diffraction and ion microprobe techniques as a function of the various deposition methods.X-ray investigations noted a change in solid solution concentration as a function of Si content before and after heat-treatment. The amount of solid solution in the Al increased with heat-treatment for films with ≥2% silicon and decreased for films <2% silicon.

scholarly journals Critical effect of the bottom electrode on the ferroelectricity of epitaxial Hf0.5Zr0.5O2 thin films

2021 ◽  
Author(s):  
Saúl Estandía ◽  
Jaume Gàzquez ◽  
María Varela ◽  
Nico Dix ◽  
Mengdi Qian ◽  
...  
Keyword(s):  
Thin Films ◽  
Bottom Electrode ◽  
Orthorhombic Phase ◽  
Epitaxial Films ◽  
Critical Effect

Comparison of a set of perovskite electrodes shows that La1−x(Ca,Sr)xMnO3 is critical to stabilize the ferroelectric orthorhombic phase in epitaxial films. The stabilization is favored if the La content in the manganite is high.

scholarly journals Paraelectric/antiferroelectric/ferroelectric phase transformation in As-deposited ZrO2 thin films by the TiN capping engineering

2020 ◽  
Vol 195 ◽  
pp. 109020
Author(s):  
Chun-Yuan Wang ◽  
Chin-I Wang ◽  
Sheng-Han Yi ◽  
Teng-Jan Chang ◽  
Chun-Yi Chou ◽  
...  
Keyword(s):  
Thin Films ◽  
Phase Transformation ◽  
Ferroelectric Phase

Phase transition and piezoelectricity of sol–gel-processed Sm-doped BiFeO3 thin films on Pt(111)/Ti/SiO2/Si substrates

2015 ◽  
Vol 3 (9) ◽  
pp. 2115-2122 ◽  
Author(s):  
Wei Sun ◽  
Jing-Feng Li ◽  
Qi Yu ◽  
Li-Qian Cheng
Keyword(s):  
Thin Films ◽  
Phase Transition ◽  
Sol Gel ◽  
Orthorhombic Phase ◽  
High Quality ◽  
Si Substrates ◽  
Bifeo3 Thin Films ◽  
Gel Processing

We prepared high-quality Bi1−xSmxFeO3 films on Pt(111)/Ti/SiO2/Si substrates by sol–gel processing and found rhombohedral–orthorhombic phase transition with enhanced piezoelectricity.

Microstructural Study of Thin Films CuFe Obtained by Thermal Evaporation of Nanostructured Milled Powder

2017 ◽  
Vol 47 ◽  
pp. 71-78
Author(s):  
H. Mechri ◽  
Ahmed Haddad ◽  
M. Zergoug ◽  
Mohammed Azzaz
Keyword(s):  
Thin Films ◽  
Solid Solution ◽  
Physical Vapor Deposition ◽  
Thermal Evaporation ◽  
Supersaturated Solid Solution ◽  
Milled Powder ◽  
Mechanically Alloyed ◽  
Glass Substrates ◽  
Milling Duration ◽  
Tungsten Boat

Commercial copper and iron powders were used as starting materials. These powders were mechanically alloyed to obtain Cu(100-x) Fex supersaturated mixture. The milling duration was chosen in such a way as to obtain a nanostructured mixture and to form a supersaturated solid solution of CuFe; the powder mixture was used to deposit CuFe on a glass substrate. The elaboration of our films has been carried out using thermal evaporation process (physical vapor deposition) under 1 × 10-6 mbar vacuum from an electrically heated tungsten boat, using the supersaturated solid solution Cu(100-x) Fex powder obtained by mechanical alloying. The films deposition has been done on glass substrates. In this study, we present the composition effect on the structural and magnetic proprieties of Cu(100-x) Fex powder and thin films. The chemical composition, structural and magnetic proprieties of milled powders and thin films were examined by SEM, TEM, XRD, XRF and VSM.

Investigation into Hardness and Young’s Modulus of Thin Films of Lead Germanium Telluride

2012 ◽  
Vol 455-456 ◽  
pp. 8-12 ◽  
Author(s):  
Bin Li ◽  
Ping Xie ◽  
Su Ying Zhang ◽  
Ding Quan Liu
Keyword(s):  
Thin Films ◽  
Young’S Modulus ◽  
Ferroelectric Phase ◽  
Young's Modulus ◽  
Strength Loss ◽  
Electron Beam Evaporation ◽  
Silicon Substrates ◽  
Strain Fields ◽  
Germanium Telluride ◽  
Nanoindentation Measurement

A mechanically robust infrared high-index coating material is essential to the infrared interference coatings. Lead germanium telluride (Pb1-xGexTe) is a pseudo-binary alloy of IV-VI narrow gap semiconductors of PbTe and GeTe. In our investigation, the hardness and Young’s modulus of thin films of Pb1-xGexTe, which were deposited on silicon substrates using electron beam evaporation, were identified by means of nanoindentation measurement. It is demonstrated that layers of Pb1-xGexTe have greater hardness and Young’s modulus compared with those of PbTe. These mechanical behaviors of layers can be linked to a ferroelectric phase transition from a cubic paraelectric phase to a rhombohedral, ferroelectric phase. Moreover, the strength loss in the layers of Pb1-xGexTe can be also explained in light of strong localized elastic-strain fields in concentrated solid solutions.

Sign in / Sign up

Export Citation Format

Share Document