The large response current of a vacuum pressure sensor based on a vertically-aligned ZnO nanowires array
Keyword(s):
A vertically-aligned ZnO nanowires (VA-ZnO-NWs) array was prepared via chemical vapor deposition, which was used to fabricate a vacuum pressure sensor and its sensitive characteristics were measured using a semiconductor parameter tester.
2004 ◽
Vol 108
(17)
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pp. 5206-5210
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Keyword(s):
Keyword(s):
2002 ◽
Vol 361
(3-4)
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pp. 189-195
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2009 ◽
Vol 18
(2-3)
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pp. 307-311
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