Influences of nitrogen partial pressure on the optical properties of copper nitride films

Jianrong Xiao; Meng Qi; Yong Cheng; Aihua Jiang; Yaping Zeng; Jiafeng Ma

doi:10.1039/c6ra03479a

Influences of nitrogen partial pressure on the optical properties of copper nitride films

RSC Advances ◽

10.1039/c6ra03479a ◽

2016 ◽

Vol 6 (47) ◽

pp. 40895-40899 ◽

Cited By ~ 13

Author(s):

Jianrong Xiao ◽

Meng Qi ◽

Yong Cheng ◽

Aihua Jiang ◽

Yaping Zeng ◽

...

Keyword(s):

Optical Properties ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Partial Pressure ◽

Radio Frequency Magnetron ◽

Nitrogen Partial Pressure ◽

Radio Frequency Magnetron Sputtering ◽

Copper Nitride

Cu3N films were prepared by radio frequency magnetron sputtering techniques and the optical properties of the films were investigated.

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Structural and optical properties of CdSe0.2Te0.8 thin films prepared by radio frequency magnetron sputtering

Materials Letters ◽

10.1016/j.matlet.2021.129320 ◽

2021 ◽

Vol 288 ◽

pp. 129320

Author(s):

Guangqiang He ◽

Zhihui Xiong ◽

Hui Yang ◽

Ming Yang ◽

Zhixi Li ◽

...

Keyword(s):

Thin Films ◽

Optical Properties ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering ◽

Structural And Optical Properties

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Effect of annealing and atmosphere on the structure and optical properties of Mg2TiO4thin films obtained by the radio frequency magnetron sputtering method

Journal of Experimental Nanoscience ◽

10.1080/17458080.2012.690894 ◽

2013 ◽

Vol 8 (3) ◽

pp. 371-381 ◽

Cited By ~ 5

Author(s):

R. K Bhuyan ◽

T. Santhosh Kumar ◽

A. Perumal ◽

P. Saravanan ◽

D. Pamu

Keyword(s):

Optical Properties ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering

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Optical properties of SrTiO3 thin films deposited by radio-frequency magnetron sputtering at various substrate temperatures

Journal of Applied Physics ◽

10.1063/1.2168029 ◽

2006 ◽

Vol 99 (3) ◽

pp. 033515 ◽

Cited By ~ 16

Author(s):

J. H. Ma ◽

Z. M. Huang ◽

X. J. Meng ◽

S. J. Liu ◽

X. D. Zhang ◽

...

Keyword(s):

Thin Films ◽

Optical Properties ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering ◽

Substrate Temperatures

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Effects of substrate on the structural, electrical and optical properties of Al-doped ZnO films prepared by radio frequency magnetron sputtering

Thin Solid Films ◽

10.1016/j.tsf.2008.11.103 ◽

2009 ◽

Vol 517 (11) ◽

pp. 3265-3268 ◽

Cited By ~ 59

Author(s):

C. Li ◽

M. Furuta ◽

T. Matsuda ◽

T. Hiramatsu ◽

H. Furuta ◽

...

Keyword(s):

Optical Properties ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Radio Frequency Magnetron ◽

Zno Films ◽

Radio Frequency Magnetron Sputtering ◽

Electrical And Optical Properties ◽

Doped Zno

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Preparation and characterization of copper nitride films at various nitrogen contents by reactive radio-frequency magnetron sputtering

Materials Letters ◽

10.1016/j.matlet.2005.12.028 ◽

2006 ◽

Vol 60 (15) ◽

pp. 1809-1812 ◽

Cited By ~ 14

Author(s):

X.M. Yuan ◽

P.X. Yan ◽

J.Z. Liu

Keyword(s):

Magnetron Sputtering ◽

Radio Frequency ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering ◽

Copper Nitride ◽

Nitrogen Contents

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An investigation on the effect of high partial pressure of hydrogen on the nanocrystalline structure of silicon carbide thin films prepared by radio-frequency magnetron sputtering

Spectrochimica Acta Part A Molecular and Biomolecular Spectroscopy ◽

10.1016/j.saa.2014.10.029 ◽

2015 ◽

Vol 136 ◽

pp. 1409-1417 ◽

Cited By ~ 8

Author(s):

Mohsen Daouahi ◽

Mourad Omri ◽

Abdul Ghani Yousseph Kerm ◽

Faisal Abdulaziz Al-Agel ◽

Najeh Rekik

Keyword(s):

Thin Films ◽

Silicon Carbide ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Partial Pressure ◽

Nanocrystalline Structure ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering ◽

High Partial Pressure

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Structural and optical properties of Ca_xBa_1-xNb_2O_6 thin films deposited by radio frequency magnetron sputtering

Optical Materials Express ◽

10.1364/ome.5.002404 ◽

2015 ◽

Vol 5 (11) ◽

pp. 2404 ◽

Cited By ~ 4

Author(s):

S. Vigne ◽

N. Hossain ◽

S.M. Humayun Kabir ◽

J. Margot ◽

K. Wu ◽

...

Keyword(s):

Thin Films ◽

Optical Properties ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering ◽

Structural And Optical Properties

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Copper nitride thin film prepared by reactive radio-frequency magnetron sputtering

Journal of Applied Physics ◽

10.1063/1.2132507 ◽

2005 ◽

Vol 98 (10) ◽

pp. 103506 ◽

Cited By ~ 62

Author(s):

G. H. Yue ◽

P. X. Yan ◽

J. Z. Liu ◽

M. X. Wang ◽

M. Li ◽

...

Keyword(s):

Thin Film ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering ◽

Copper Nitride

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Optical properties of nano-structured zinc oxide thin films deposited by radio-frequency magnetron sputtering at different substrate temperatures

2012 IEEE Symposium on Humanities, Science and Engineering Research ◽

10.1109/shuser.2012.6268895 ◽

2012 ◽

Cited By ~ 1

Author(s):

I. Saurdi ◽

M. H. Mamat ◽

M. H. Abdullah ◽

A. Ishak ◽

M. Rusop

Keyword(s):

Thin Films ◽

Zinc Oxide ◽

Optical Properties ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering ◽

Oxide Thin Films ◽

Substrate Temperatures

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Structural and Optical Properties of ZnO/Glass Thin Films Grown by Radio-Frequency Magnetron Sputtering with a Powder Target

Applied Science and Convergence Technology ◽

10.5757/jkvs.2009.18.5.394 ◽

2009 ◽

Vol 18 (5) ◽

pp. 394-401

Author(s):

J.H. Sun ◽

H.C. Kang

Keyword(s):

Thin Films ◽

Optical Properties ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering ◽

Structural And Optical Properties ◽

Powder Target

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