scholarly journals Reactions in silicon–nitrogen plasma

2017 ◽  
Vol 19 (5) ◽  
pp. 3826-3836 ◽  
Author(s):  
Goran Kovačević ◽  
Branko Pivac

Reactions that take place in silane–ammonia plasma are analysed in detail. These reactions are of fundamental importance since they are the elementary reactions for forming the silicon–nitrogen bond. These results not only explain kinetics of gas phase reactions, but also reactions that are responsible for the growth of silicon nitride, an industrially important material.

1999 ◽  
Vol 584 ◽  
Author(s):  
Carlo Cavallotti ◽  
Valeria Bertani ◽  
Maurizio Masi ◽  
Sergio Carrà

AbstractThe kinetics of deposition of CdTe, ZnS and ZnSe films was studied. An overall microkinetically reversible kinetic scheme consisting of elementary reactions, comprehensive of gas phase and surface processes was developed. Kinetic constants of gas phase reactions were either found in the literature or determined through quantum chemistry methods. Kinetic constants of surface reactions were first guessed combining kinetic theory with quantum chemical calculations and then their values were refined to reproduce experimental data. The kinetics schemes so developed were tested through the simulation of deposition reactors. Measured growth rates and gas phase compositions were thus compared with those calculated. The major finding of this studies is that the growth of CdTe, ZnS and ZnSe can be represented adopting a surface kinetic scheme constituted essentially by the same fundamental steps.


2008 ◽  
Vol 199 (1) ◽  
pp. 92-97 ◽  
Author(s):  
M.P. Sulbaek Andersen ◽  
E.J.K. Nilsson ◽  
O.J. Nielsen ◽  
M.S. Johnson ◽  
M.D. Hurley ◽  
...  

2004 ◽  
Vol 108 (50) ◽  
pp. 11019-11025 ◽  
Author(s):  
Lars P. Thüner ◽  
Perla Bardini ◽  
Gerard J. Rea ◽  
John C. Wenger

2018 ◽  
Vol 20 (16) ◽  
pp. 10732-10740 ◽  
Author(s):  
Bun Chan ◽  
John M. Simmie

The kinetics of many reactions are critically dependent upon the barrier heights for which accurate determination can be difficult. More than 100 accurate barriers are obtained with the high-level W3X-L composite procedure.


1974 ◽  
Vol 5 (13) ◽  
Author(s):  
ROBERT J. CRAWFORD ◽  
VESNA VUKOV ◽  
HIROKAZU TOKUNAGA

1970 ◽  
Vol 25 (11) ◽  
pp. 1772
Author(s):  
T.S.R Ao ◽  
A. Patil

Abstract It has been shown that in kinetically first order gas phase reactions occuring under electric discharge, such as the decomposition of N2O, the application, at various initial pressures, of the same multiple of the respective starting potential ensures that the reaction occurs at the same specific rate.


2009 ◽  
Vol 41 (8) ◽  
pp. 532-542 ◽  
Author(s):  
L. Chen ◽  
T. Uchimaru ◽  
J. Mizukado ◽  
S. Kutsuna ◽  
K. Tokuhashi ◽  
...  

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