Reactions in silicon–nitrogen plasma
2017 ◽
Vol 19
(5)
◽
pp. 3826-3836
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Keyword(s):
Reactions that take place in silane–ammonia plasma are analysed in detail. These reactions are of fundamental importance since they are the elementary reactions for forming the silicon–nitrogen bond. These results not only explain kinetics of gas phase reactions, but also reactions that are responsible for the growth of silicon nitride, an industrially important material.
Keyword(s):
2008 ◽
Vol 199
(1)
◽
pp. 92-97
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Keyword(s):
2004 ◽
Vol 48
(3)
◽
pp. 241-260
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Keyword(s):
2004 ◽
Vol 108
(50)
◽
pp. 11019-11025
◽
2018 ◽
Vol 20
(16)
◽
pp. 10732-10740
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Keyword(s):
Keyword(s):
2009 ◽
Vol 41
(8)
◽
pp. 532-542
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