Space charge-induced unusually-high mobility of a solution-processed indium oxide thin film transistor with an ethylene glycol incorporated aluminum oxide gate dielectric

RSC Advances ◽  
2015 ◽  
Vol 5 (124) ◽  
pp. 102362-102366 ◽  
Author(s):  
Hyungjin Park ◽  
Yunyong Nam ◽  
Jungho Jin ◽  
Byeong-Soo Bae
Keyword(s):  
Thin Film ◽  
Ethylene Glycol ◽  
Aluminum Oxide ◽  
Space Charge ◽  
Gate Dielectric ◽  
Thin Film Transistor ◽  
High Mobility ◽  
Oxide Thin Film ◽  
Solution Processed ◽  
Indium Oxide Thin Film

Undecomposed ethylene glycol residuals in solution processed aluminum oxide gate dielectric result in the frequency-dependent capacitance.

Ultra-Low Voltage Metal Oxide Thin Film Transistor by Low-Temperature Annealed Solution Processed LiAlO2 Gate Dielectric

2019 ◽  
Vol 16 (1) ◽  
pp. 22-34 ◽  
Author(s):  
Anand Sharma ◽  
Nitesh K. Chourasia ◽  
Vishwas Acharya ◽  
Nila Pal ◽  
Sajal Biring ◽  
...  
Keyword(s):  
Thin Film ◽  
Low Temperature ◽  
Metal Oxide ◽  
Gate Dielectric ◽  
Low Voltage ◽  
Thin Film Transistor ◽  
Oxide Thin Film ◽  
Solution Processed ◽  
Metal Oxide Thin Film

High mobility ultra-thin crystalline indium oxide thin film transistor using atomic layer deposition

2018 ◽  
Vol 113 (11) ◽  
pp. 112102 ◽  
Author(s):  
Jongchan Lee ◽  
Jaehyun Moon ◽  
Jae-Eun Pi ◽  
Seong-Deok Ahn ◽  
Himchan Oh ◽  
...  
Keyword(s):  
Thin Film ◽  
Atomic Layer Deposition ◽  
Indium Oxide ◽  
Thin Film Transistor ◽  
High Mobility ◽  
Atomic Layer ◽  
Oxide Thin Film ◽  
Layer Deposition ◽  
Indium Oxide Thin Film

Solution-processed Pb0.8Ba0.2ZrO3 as a gate dielectric for low-voltage metal-oxide thin-film transistor

2020 ◽  
Vol 3 (1) ◽  
pp. 57-62 ◽  
Author(s):  
Vishwas Acharya ◽  
Anand Sharma ◽  
Nitesh K. Chourasia ◽  
Bhola N. Pal
Keyword(s):  
Thin Film ◽  
Metal Oxide ◽  
Gate Dielectric ◽  
Low Voltage ◽  
Thin Film Transistor ◽  
Oxide Thin Film ◽  
Solution Processed ◽  
Metal Oxide Thin Film

scholarly journals High mobility polycrystalline indium oxide thin-film transistors by means of plasma-enhanced atomic layer deposition

2016 ◽  
Vol 4 (28) ◽  
pp. 6873-6880 ◽  
Author(s):  
H.-I. Yeom ◽  
J. B. Ko ◽  
G. Mun ◽  
S.-H. Ko Park
Keyword(s):  
Thin Film ◽  
Atomic Layer Deposition ◽  
Indium Oxide ◽  
Thin Film Transistor ◽  
High Mobility ◽  
Atomic Layer ◽  
Oxide Thin Film ◽  
Layer Deposition ◽  
Polycrystalline Phase ◽  
Indium Oxide Thin Film

A thin-film transistor with a 5 nm-thick indium oxide active layer deposited by plasma-enhanced atomic layer deposition (PEALD) showed outstanding performance even with a polycrystalline phase.

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