Facile non thermal plasma based desorption of self assembled monolayers for achieving low temperature and low pressure Cu–Cu thermo-compression bonding
Keyword(s):
This paper reports Self Assembled Monolayer (SAM) of propanethiol desorption assisted low temperature, low pressure Cu–Cu thermo-compression bonding, a technique which could be applied to developing next generation heterogeneous smart devices.
2018 ◽
Vol 767
◽
pp. 69-76
◽
1999 ◽
Vol 77
(5-6)
◽
pp. 1077-1084
◽
2007 ◽
Vol 121-123
◽
pp. 495-498
◽
Keyword(s):