Enhanced self-assembled monolayer treatment on polymeric gate dielectrics with ultraviolet/ozone assistance in organic thin film transistors
Keyword(s):
Chemical vapor deposition (CVD) is utilized to form self-assembled monolayers on polymeric insulators. Ultraviolet/ozone (UVO) treatment is used to enhance the alignment of HMDS monolayer on polymeric insulator surface and a time dependent effect is observed for UVO.
2006 ◽
2002 ◽
Vol 2
(3)
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pp. 267-279
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2010 ◽
Vol 11
(10)
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pp. 1620-1623
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