Electrical and thermal conduction in ultra-thin freestanding atomic layer deposited W nanobridges
Electro/thermal conduction is reduced substantially in ultra-thin ALD W films. Evidence of phonon conduction appears in fabricated W structures.
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2012 ◽
Vol 207
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pp. 233-239
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1995 ◽
Vol 53
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pp. 40-41
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2008 ◽
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2015 ◽
Vol 18
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pp. 7-45
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2008 ◽
Vol 6
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pp. 349-360
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