Physical, chemical, and in vitro toxicological characterization of nanoparticles in chemical mechanical planarization suspensions used in the semiconductor industry: towards environmental health and safety assessments

2015 ◽  
Vol 2 (3) ◽  
pp. 227-244 ◽  
Author(s):  
David Speed ◽  
Paul Westerhoff ◽  
Reyes Sierra-Alvarez ◽  
Rockford Draper ◽  
Paul Pantano ◽  
...  
Keyword(s):  
Environmental Health ◽  
Semiconductor Industry ◽  
Chemical Mechanical Planarization ◽  
Health And Safety ◽  
Engineered Nanoparticles ◽  
Environmental Health And Safety ◽  
Physical Chemical ◽  
Safety Assessments

This tutorial review focuses on aqueous slurries of dispersed engineered nanoparticles (ENPs) used in chemical mechanical planarization (CMP) for polishing wafers during manufacturing of semiconductors.

scholarly journals Fluorescently Labeled Cellulose Nanofibers for Environmental Health and Safety Studies

Nanomaterials ◽  
2021 ◽  
Vol 11 (4) ◽  
pp. 1015
Author(s):  
Ilabahen Patel ◽  
Jeremiah Woodcock ◽  
Ryan Beams ◽  
Stephan J. Stranick ◽  
Ryan Nieuwendaal ◽  
...  
Keyword(s):  
Environmental Health ◽  
Single Photon ◽  
Cellulose Nanofibers ◽  
Photon Counting ◽  
Health And Safety ◽  
Covalent Attachment ◽  
Fluorescence Lifetime Imaging ◽  
Environmental Health And Safety

An optimal methodology for locating and tracking cellulose nanofibers (CNFs) in vitro and in vivo is crucial to evaluate the environmental health and safety properties of these nanomaterials. Here, we report the use of a new boron-dipyrromethene (BODIPY) reactive fluorescent probe, meso-DichlorotriazineEthyl BODIPY (mDTEB), tailor-made for labeling CNFs used in simulated or in vivo ingestion exposure studies. Time-correlated single photon counting (TCSPC) fluorescence lifetime imaging microscopy (FLIM) was used to confirm covalent attachment and purity of mDTEB-labeled CNFs. The photoluminescence properties of mDTEB-labeled CNFs, characterized using fluorescence spectroscopy, include excellent stability over a wide pH range (pH2 to pH10) and high quantum yield, which provides detection at low (μM) concentrations. FLIM analysis also showed that lignin-like impurities present on the CNF reduce the fluorescence of the mDTEB-labeled CNF, via quenching. Therefore, the chemical composition and the methods of CNF production affect subsequent studies. An in vitro triculture, small intestinal, epithelial model was used to assess the toxicity of ingested mDTEB-labeled CNFs. Zebrafish (Danio rerio) were used to assess in vivo environmental toxicity studies. No cytotoxicity was observed for CNFs, or mDTEB-labeled CNFs, either in the triculture cells or in the zebrafish embryos.

scholarly journals Development and characterization of antibody reagents for detecting nanoparticles

Nanoscale ◽  
2015 ◽  
Vol 7 (47) ◽  
pp. 20042-20054 ◽  
Author(s):  
Supriya Ravichandran ◽  
Mark A. Sullivan ◽  
Linda M. Callahan ◽  
Karen L. Bentley ◽  
Lisa A. DeLouise
Keyword(s):  
Environmental Health ◽  
Health And Safety ◽  
Environmental Health And Safety ◽  
Commercial Products ◽  
Safety Concerns

The increasing use of nanoparticles (NPs) in technological applications and in commercial products has escalated environmental health and safety concerns.

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