Application of temperature cycling for crystal quality control during crystallization
AlN/AlGaN/GaN buffer optimization on silicon (111): bow and crystal quality control for Si-CMOS fabs
2014 ◽
Vol 11
(3-4)
◽
pp. 450-453
◽
2013 ◽
Vol 860-863
◽
pp. 2395-2398
Keyword(s):
2003 ◽
Vol 118
(3)
◽
pp. 193-196
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